Hard x-ray nanofocusing with refractive x-ray optics: full beam characterization by ptychographic imaging
2013 (English)In: Proceedings of SPIE, 2013, 884807- p.Conference paper (Refereed)
Hard x-ray scanning microscopy relies on small and intensive nanobeams. Refractive x-ray lenses are well suited to generate hard x-ray beams with lateral dimensions of 100 nm and below. The diffraction limited beam size of refractive x-ray lenses mainly depends on the focal length and the attenuation inside the lens material. The numerical aperture of refractive lenses scales with the inverse square root of the focal length until it reaches the critical angle of total reflection. We have used nanofocusing refractive x-ray lenses made of silicon to focus hard x-rays at 8 and 20 keV to (sub-)100 nm dimensions. Using ptychographic scanning coherent diffraction imaging we have characterized these nanobeams with high accuracy and sensitivity, measuring the full complex wave field in the focus. This gives access to the full caustic and aberrations of the x-ray optics. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Place, publisher, year, edition, pages
2013. 884807- p.
, Proceedings of SPIE, ISSN 0277-786X ; 8848
hard x-ray nanobeam, nanofocusing refractive x-ray lenses, ptychography, beam characterization
Atom and Molecular Physics and Optics
IdentifiersURN: urn:nbn:se:kth:diva-137220DOI: 10.1117/12.2024127ISI: 000326748800005ScopusID: 2-s2.0-84888882538ISBN: 978-0-8194-9698-0OAI: oai:DiVA.org:kth-137220DiVA: diva2:678427
Advances in X-Ray/EUV Optics and Components VIII; San Diego, CA, United States, 26-28 August, 2013
QC 201406132013-12-122013-12-122014-06-13Bibliographically approved