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Design and fabrication of a tuning fork shaped voltage controlled resonator for low-voltage applications with additional tuning electrodes
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. Department of Micro and Nanosciences, Aalto University, Tietotie 3, Espoo FI-00076, Finland .
2013 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 23, no 11Article in journal (Refereed) Published
Abstract [en]

In this work a silicon voltage controlled microelectromechanical tuning fork resonator with electrostatic actuation and separate frequency tuning electrodes is presented. The released device is fabricated using a silicon-on-insulator wafer by a two-step process involving only focused ion beam masking and cryogenic deep reactive ion etching. This process is ideal for rapid prototyping, as the time to turn a design into the final device is only a few hours. The design of the resonator is optimized to accommodate the restrictions of the fabrication process, to maximize the frequency tuning range and to minimize the biasing voltage. Separating tuning and driving electrodes enables the resonance frequency adjustment by over 70 000 ppm (f center > 1.5 MHz, quality factor Q ≈ 2000) with a tuning voltage of 29 V in an open loop mode.

Place, publisher, year, edition, pages
2013. Vol. 23, no 11
Keyword [en]
Deep Reactive Ion Etching, Electrostatic actuation, Fabrication process, Frequency tuning range, Low-voltage applications, Microelectromechanical tuning, Resonance frequencies, Silicon on insulator wafers, Electrodes, Electrostatic actuators, Fabrication, Resonators, Silicon wafers, Design
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:kth:diva-139999DOI: 10.1088/0960-1317/23/11/115004ISI: 000326344500025Scopus ID: 2-s2.0-84887121142OAI: oai:DiVA.org:kth-139999DiVA: diva2:688684
Note

QC 20140117

Available from: 2014-01-17 Created: 2014-01-16 Last updated: 2017-12-06Bibliographically approved

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
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  • asciidoc
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