Robust control of atomic force microscopy
2013 (English)In: Mechatronics, John Wiley & Sons, 2013, 103-132 p.Chapter in book (Other academic)
The atomic force microscope (AFM) is an instrument used for acquiring images at nanometer scale. Obtaining better image quality at higher scan speed is a research area of great interest in the control of an AFM. Improving the dynamic response of the scanning probe in the vertical direction and the dynamic response of the scanning motion in the lateral plane are the two major areas of application of advanced control methods to an AFM. The uncertainties inherent in the models of AFM vertical and lateral direction motion stages dictates the application of robust control methods. In this chapter, robust control methods are applied to AFM, treating first the vertical direction and then the lateral plane.
Place, publisher, year, edition, pages
John Wiley & Sons, 2013. 103-132 p.
AFM imaging, AFM robust control, MIMO disturbance, Tapping mode AFM, Vertical direction
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-140088DOI: 10.1002/9781118614549.ch4ScopusID: 2-s2.0-84886973772ISBN: 9781848213081OAI: oai:DiVA.org:kth-140088DiVA: diva2:689116
QC 201401202014-01-202014-01-172014-01-20Bibliographically approved