A MEMS-based oscillator with synchronous amplitude control
2013 (English)In: Conf. Proc. - Conf. Ph. D. Res. Microelectron. Electron., PRIME, 2013, 117-120 p.Conference paper (Refereed)
This paper describes the design and simulation of a MEMS-based oscillator with a silicon tuning fork as frequency selective element. The interface electronics include a synchronous amplitude control circuit that allows for precise control of oscillation amplitude. The nominal oscillation frequency is 1.8 MHz. The structure has been implemented using a 0.35 μm High Voltage CMOS process and operates with a nominal supply of 3.3V.
Place, publisher, year, edition, pages
2013. 117-120 p.
, Conference Proceedings - 9th Conference on Ph. D. Research in Microelectronics and Electronics, PRIME 2013
Amplitude control, Design and simulation, Frequency-selective, High voltage CMOS process, Interface electronics, Oscillation amplitude, Oscillation frequency, Precise control, CMOS integrated circuits, Microelectronics, Microelectromechanical devices
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-140052DOI: 10.1109/PRIME.2013.6603129ScopusID: 2-s2.0-84885394865ISBN: 9781467345804OAI: oai:DiVA.org:kth-140052DiVA: diva2:689255
9th Conference on Ph. D. Research in Microelectronics and Electronics, PRIME 2013, 24 June 2013 through 27 June 2013, Villach
QC 201401202014-01-202014-01-162014-01-22Bibliographically approved