Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
A MEMS-based oscillator with synchronous amplitude control
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
2013 (English)In: Conf. Proc. - Conf. Ph. D. Res. Microelectron. Electron., PRIME, 2013, 117-120 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper describes the design and simulation of a MEMS-based oscillator with a silicon tuning fork as frequency selective element. The interface electronics include a synchronous amplitude control circuit that allows for precise control of oscillation amplitude. The nominal oscillation frequency is 1.8 MHz. The structure has been implemented using a 0.35 μm High Voltage CMOS process and operates with a nominal supply of 3.3V.

Place, publisher, year, edition, pages
2013. 117-120 p.
Series
Conference Proceedings - 9th Conference on Ph. D. Research in Microelectronics and Electronics, PRIME 2013
Keyword [en]
Amplitude control, Design and simulation, Frequency-selective, High voltage CMOS process, Interface electronics, Oscillation amplitude, Oscillation frequency, Precise control, CMOS integrated circuits, Microelectronics, Microelectromechanical devices
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-140052DOI: 10.1109/PRIME.2013.6603129Scopus ID: 2-s2.0-84885394865ISBN: 9781467345804 (print)OAI: oai:DiVA.org:kth-140052DiVA: diva2:689255
Conference
9th Conference on Ph. D. Research in Microelectronics and Electronics, PRIME 2013, 24 June 2013 through 27 June 2013, Villach
Note

QC 20140120

Available from: 2014-01-20 Created: 2014-01-16 Last updated: 2014-01-22Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textScopus

Search in DiVA

By author/editor
Chekurov, Nikolay
By organisation
Micro and Nanosystems
Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar

doi
isbn
urn-nbn

Altmetric score

doi
isbn
urn-nbn
Total: 85 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf