Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
MEMS-reconfigurable wavguide iris for switchable V-band cavity resonators
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
2014 (English)In: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE , 2014, 206-209 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper presents for the first time a novel MEMS-reconfigurable inductive iris based on a 30-μm thick reconfigurable transmissive surface and reports on its application to create a switchable cavity resonator in a WR-12 rectangular waveguide (60-90 GHz). The reconfigurable surface incorporates 252 simultaneously switched contact points for activating (ON state) and deactivating (OFF state) the inductive iris by a 24 μm lateral displacement of two sets of distributed vertical cantilevers. In the ON state, these contact points are short-circuiting the electric field lines of the TE10 waveguide mode on the cross-sectional areas of a symmetric inductive waveguide iris, and are not interfering with the wave propagation in the OFF state. Thus, this novel concept allows for completely switching the inductive iris ON or OFF. The inductive iris has an insertion loss of better than 1.0 dB in the OFF state, of which 0.8 dB is attributed to the measurement setup alone. In the ON state the measured performance of the switchable iris is in good agreement with the simulation results. Furthermore, a novel, switchable cavity resonator was implemented based on such a MEMS-reconfigurable iris, and was characterized to a Q-factor of 186.13 at the resonance frequency of 68.87 GHz with the iris switched ON, and an OFF-state insertion loss of less than 2 dB (including the measurement setup) without any resonance, which is for the first time reported in this paper.

Place, publisher, year, edition, pages
IEEE , 2014. 206-209 p.
Series
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ISSN 1084-6999
Keyword [en]
Cavity resonators, Electric fields, End effectors, Insertion losses, Wave propagation, Waveguides, Contact points, Cross sectional area, Electric field lines, ITS applications, Lateral displacements, Measurement setup, Reconfigurable surfaces, Resonance frequencies
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-143041DOI: 10.1109/MEMSYS.2014.6765611ISI: 000352217500054Scopus ID: 2-s2.0-84899002763ISBN: 978-147993508-6 (print)OAI: oai:DiVA.org:kth-143041DiVA: diva2:705274
Conference
27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014; San Francisco, CA; United States; 26 January 2014 through 30 January 2014
Note

QC 20140522

Available from: 2014-03-14 Created: 2014-03-14 Last updated: 2015-08-07Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textScopus

Search in DiVA

By author/editor
Baghchehsaraei, ZarghamOberhammer, Joachim
By organisation
Micro and Nanosystems
Other Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar

doi
isbn
urn-nbn

Altmetric score

doi
isbn
urn-nbn
Total: 176 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf