Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
A 1.8 MHz MEMS-based oscillator with synchronous amplitude limiter
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
Show others and affiliations
2013 (English)In: 2013 European Conference on Circuit Theory and Design, ECCTD 2013 - Proceedings, 2013, 6662225- p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper describes the design and simulation of a MEMS-based oscillator using a synchronous amplitude limiter. The proposed solution does not require external control signals to keep the resonator drive amplitude within the desired range. In a MEMS oscillator the oscillation amplitude needs to be limited to avoid over-driving the resonator which could cause unwanted nonlinear behavior [1] or component failure. The interface electronics has been implemented and simulated in 0.35μm HV CMOS process. The resonator was fabricated using a custom rapid-prototyping process involving Focused Ion Beam masking and Cryogenic Deep Reactive Ion Etching.

Place, publisher, year, edition, pages
2013. 6662225- p.
Keyword [en]
Component failures, Deep Reactive Ion Etching, Design and simulation, External control, Interface electronics, MEMS Oscillators, Nonlinear behavior, Oscillation amplitude
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-143156Scopus ID: 2-s2.0-84892665916ISBN: 978-300043785-4 (print)OAI: oai:DiVA.org:kth-143156DiVA: diva2:706123
Conference
2013 European Conference on Circuit Theory and Design, ECCTD 2013; Dresden; Germany; 8 September 2013 through 12 September 2013
Note

QC 20140319

Available from: 2014-03-19 Created: 2014-03-17 Last updated: 2014-03-19Bibliographically approved

Open Access in DiVA

No full text

Scopus

Search in DiVA

By author/editor
Chekurov, Nikolay
By organisation
Micro and Nanosystems
Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar

isbn
urn-nbn

Altmetric score

isbn
urn-nbn
Total: 51 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf