A 1.8 MHz MEMS-based oscillator with synchronous amplitude limiter
2013 (English)In: 2013 European Conference on Circuit Theory and Design, ECCTD 2013 - Proceedings, 2013, 6662225- p.Conference paper (Refereed)
This paper describes the design and simulation of a MEMS-based oscillator using a synchronous amplitude limiter. The proposed solution does not require external control signals to keep the resonator drive amplitude within the desired range. In a MEMS oscillator the oscillation amplitude needs to be limited to avoid over-driving the resonator which could cause unwanted nonlinear behavior  or component failure. The interface electronics has been implemented and simulated in 0.35μm HV CMOS process. The resonator was fabricated using a custom rapid-prototyping process involving Focused Ion Beam masking and Cryogenic Deep Reactive Ion Etching.
Place, publisher, year, edition, pages
2013. 6662225- p.
Component failures, Deep Reactive Ion Etching, Design and simulation, External control, Interface electronics, MEMS Oscillators, Nonlinear behavior, Oscillation amplitude
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-143156ScopusID: 2-s2.0-84892665916ISBN: 978-300043785-4OAI: oai:DiVA.org:kth-143156DiVA: diva2:706123
2013 European Conference on Circuit Theory and Design, ECCTD 2013; Dresden; Germany; 8 September 2013 through 12 September 2013
QC 201403192014-03-192014-03-172014-03-19Bibliographically approved