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3D printing of silicon micro and nano structures by ion implantation, silicon deposition, and selective silicon etching
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0003-3452-6361
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-0525-8647
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9008-8402
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
2013 (English)In: Technical Paper - Society of Manufacturing Engineers, 2013Conference paper, Published paper (Refereed)
Abstract [en]

A method for additive layer-by-layer fabrication of arbitrarily shaped 3D silicon micro and nano structures is reported. The fabrication is based on alternating steps of chemical vapor deposition of silicon and local implantation of gallium ions by focused ion beam (FIB) writing. In a final step, the defined 3D structures are formed by etching the silicon in potassium hydroxide (KOH), in which the local ion implantation provides the etching selectivity. The proposed technology could change and greatly simplify the fabrication of many MEMS, NEMS, and silicon photonic devices without requiring a fully equipped semiconductor cleanroom. This layer-by-layer fabrication method is in principle also viable for the implementation of 3D structures in semiconductors other than silicon.

Place, publisher, year, edition, pages
2013.
Series
Technical Paper - Society of Manufacturing Engineers, TP13PUB47
Keyword [en]
3D printing, Focused ion beam, Ion implantation, Layered fabrication, Microstructures, Nanostructures, Silicon
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:kth:diva-143306Scopus ID: 2-s2.0-84892392885OAI: oai:DiVA.org:kth-143306DiVA: diva2:706449
Conference
SME Annual Conference, June 2-4, 2013, Baltimore, MD
Note

QC 20140320

Available from: 2014-03-20 Created: 2014-03-19 Last updated: 2014-03-20Bibliographically approved

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Authority records BETA

Fischer, Andreas C.Niklaus, FrankGylfason, Kristinn BjörgvinStemme, Göran

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