Permeability Enhancement by Multilayer Ferromagnetic Composites for Magnetic-Core On-Chip Inductors
2014 (English)In: IEEE Microwave and Wireless Components Letters, ISSN 1531-1309, E-ISSN 1558-1764, Vol. 24, no 10, 677-679 p.Article in journal (Refereed) Published
This letter reports about unpatterned ferromagnetic NiFe/AlN multilayer composites used as advanced magnetic core materials for on-chip and interposer integrated inductances. The proposed composite structure reduces RF induced currents and thus pushes the permeability cutoff to beyond 3.7 GHz, which is by a factor of 7.1 higher than for homogeneous NiFe layers of same thickness. To the best knowledge of the authors, we achieve the highest effective relative permeability of 28 at 1 GHz, highest ferromagnetic resonance frequency and highest inductance enhancement factor above 1 GHz ever reported for devices based on on-chip unpatterned NiFe magnetic cores. A single loop inductor is also implemented as a technology demonstrator, achieving an inductance enhancement of 4.8 and a quality factor enhancement of 4.5 at 400 MHz.
Place, publisher, year, edition, pages
IEEE Press, 2014. Vol. 24, no 10, 677-679 p.
Magnetic materials, microstrip, NiFe multilayer composite, permeability, permittivity, micromachined inductors
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-143665DOI: 10.1109/LMWC.2014.2341037ISI: 000343611100009ScopusID: 2-s2.0-84907939162OAI: oai:DiVA.org:kth-143665DiVA: diva2:708171
QC 201411142014-03-262014-03-262014-11-21Bibliographically approved