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Nanostructuring of GaAs with tailored topologies using colloidal lithography and dry etching
KTH, School of Information and Communication Technology (ICT).
KTH, School of Information and Communication Technology (ICT), Materials- and Nano Physics, Semiconductor Materials, HMA.ORCID iD: 0000-0002-2069-2820
KTH, School of Information and Communication Technology (ICT), Materials- and Nano Physics, Semiconductor Materials, HMA.
2014 (English)In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 32, no 2, 021801- p.Article in journal (Refereed) Published
Abstract [en]

The authors report on the fabrication of GaAs nanopillars with different profiles/topologies using colloidal lithography and dry etching. GaAs nanopillars with different shapes and dimensions were successfully fabricated using inductively coupled plasma reactive ion etching. Two different etch chemistries CH4/H-2/Cl-2 and Ar/Cl-2 were investigated. The fabricated nanopillar arrays had a typical period of similar to 500 nm, and the depths could be varied from a few nanometers to 4 mu m. The CH4/H-2/Cl-2 chemistry with optimized gas flows and plasma powers is shown to produce nanopillars with smooth sidewalls compared to those fabricated with the Ar/Cl-2 chemistry. The GaAs nanopillar arrays have appreciably lower reflectivities in the measured wavelength range from 400 to 850 nm and are typically one order of magnitude lower compared to planar GaAs, which shows their potential for photovoltaic applications.

Place, publisher, year, edition, pages
2014. Vol. 32, no 2, 021801- p.
Keyword [en]
Nanowire Solar-Cells, High Optical-Quality, 2nd-Harmonic Generation, Fabrication, Light, Nanopillars, Arrays
National Category
Engineering and Technology
URN: urn:nbn:se:kth:diva-144958DOI: 10.1116/1.4862976ISI: 000333560600046OAI: diva2:715396
Swedish Research CouncilEU, FP7, Seventh Framework Programme

QC 20140505

Available from: 2014-05-05 Created: 2014-05-05 Last updated: 2014-11-04Bibliographically approved
In thesis
1. Ensemble and Individual III-V Semiconductor Nanopillars: Optical Properties and Applications
Open this publication in new window or tab >>Ensemble and Individual III-V Semiconductor Nanopillars: Optical Properties and Applications
2014 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Optical properties of semiconductor nanowires (NWs)/nanopillars (NPs), as individual or ensemble, have attracted significant research interest in recent years. Their potential applications range from solid-state lighting, photovoltaics, lasing and nonlinear optics to sensing and life sciences. Many of III-V NWs/NPs are particularly interesting for optoelectronic and photovoltaic applications, because of their direct band gap, high refractive index and superior electrical properties. These properties are beneficial for use in next generation solar cells by reducing the active cell thickness, while maintaining high efficiency. Furthermore, high second order nonlinearity coefficients of many III-V materials, for example GaAs and GaP, enhanced electric fields and tight confinement of optical modes make nanowaveguide geometries ideal for nonlinear effects.

The focus of this thesis is on the fabrication of III-V NPs, their optical properties and applications. Different methods for fabrication of NPs (top-down approach) are proposed. The fabricated NPs show a broadband suppression of reflectance, which is particularly an interesting feature for photovoltaic applications. The effect of the shape and geometry of GaAs NPs on their reflectance spectra is investigated and the experimental data show a very good agreement with the simulations. In order to decrease surface recombination in the fabricated GaAs NPs, a sulfur-based chemical passivation method was used, resulting in the recovery of photoluminescence (PL) linewidth and enhancing the PL intensity for more than an order of magnitude. Moreover, a unique wafer-scale self-organization process for generation of InP NPs is demonstrated. As a proof of concept, the self-organized InP NPs were used to fabricate solar cell devices. For fabrication of InP NP solar cells, epitaxial overgrowth of NPs arrays was used to realize p-n junctions. A significant increase in the open circuit voltage (0.13 V) of the NP solar cell was obtained after surface passivation.

Second-harmonic generation (SHG) was experimentally observed from GaP NP waveguides (single and in arrays) with vertical geometry. The generated second- harmonic light was analyzed with respect to the size of the NP waveguides and the corresponding effects of surface and bulk nonlinearities. In case of individual NPs, SHG was analyzed considering different modal excitations in GaP NPs. It was demonstrated that by varying the NP diameter and changing the pump polarization, it is possible to alter the field distribution of the radiated SHG light. The importance of tight confinement of the pump in the NP waveguides and consequently the longitudinal component of the electric field in this geometry is shown. A method was proposed to distinguish between surface and bulk contributions in SHG, which also addressed how to employ surface SHG to enhance the generated light. The proposed method was used to estimate the nonlinear coefficient and the effective thickness of the nonlinear region at the surface of GaP NP waveguides. Based on these findings, the corresponding nonlinear coefficient at the surface is estimated to be approximately 15 times higher, compared to the bulk. These findings, suggest that NPs/NWs (in this case GaP NPs) are potential alternatives for future nonlinear nanophotonic devices. Additionally, the SHG light from single GaP NPs are promising candidates for ultrafast light sources at nanoscopic scale, with potential applications in sensing, bio and single cell/ molecular imaging.

Place, publisher, year, edition, pages
Stockholm: KTH Royal Institute of Technology, 2014. xiii, 68 p.
TRITA-ICT/MAP AVH, ISSN 1653-7610 ; 2014:14
nanopillar, nanowires, nanophotonics, nanofabrication, III-V semiconductors, photovoltaics, second-harmonic generation, top-down approach, colloidal lithography, antireflection, modal dispersion, polarization, nanowaveguide, indium phosphide, gallium arsenide, gallium phosphide
National Category
Nano Technology
Research subject
urn:nbn:se:kth:diva-155205 (URN)978-91-7595-333-5 (ISBN)
Public defence
2014-11-26, Sal/hall 205, Electrum, KTH-ICT, Kista, 10:00 (English)

QC 20141104

Available from: 2014-11-04 Created: 2014-11-03 Last updated: 2014-11-04Bibliographically approved

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Awan, Kashif MasudSanatinia, RezaAnand, Srinivasan
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