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Optimization of InP growth directly on Si by corrugated epitaxial lateral overgrowth
KTH, School of Information and Communication Technology (ICT), Materials- and Nano Physics, Semiconductor Materials, HMA.
KTH, School of Information and Communication Technology (ICT), Materials- and Nano Physics, Semiconductor Materials, HMA.
KTH, School of Information and Communication Technology (ICT), Materials- and Nano Physics, Semiconductor Materials, HMA.ORCID iD: 0000-0002-8545-6546
KTH, School of Information and Communication Technology (ICT), Materials- and Nano Physics, Semiconductor Materials, HMA.ORCID iD: 0000-0002-0977-2598
2015 (English)In: Journal of Physics D: Applied Physics, ISSN 0022-3727, E-ISSN 1361-6463, Vol. 48, no 4, p. 045102-Article in journal (Refereed) Published
Abstract [en]

In an attempt to achieve an InP-Si heterointerface, a new and generic method, the corrugated epitaxial lateral overgrowth (CELOG) technique in a hydride vapor phase epitaxy reactor, was studied. An InP seed layer on Si (0 0 1) was patterned into closely spaced etched mesa stripes, revealing the Si surface in between them. The surface with the mesa stripes resembles a corrugated surface. The top and sidewalls of the mesa stripes were then covered by a SiO2 mask after which the line openings on top of the mesa stripes were patterned. Growth of InP was performed on this corrugated surface. It is shown that growth of InP emerges selectively from the openings and not on the exposed silicon surface, but gradually spreads laterally to create a direct interface with the silicon, hence the name CELOG. We study the growth behavior using growth parameters. The lateral growth is bounded by high index boundary planes of {3 3 1} and {2 1 1}. The atomic arrangement of these planes, crystallographic orientation dependent dopant incorporation and gas phase supersaturation are shown to affect the extent of lateral growth. A lateral to vertical growth rate ratio as large as 3.6 is achieved. X-ray diffraction studies confirm substantial crystalline quality improvement of the CELOG InP compared to the InP seed layer. Transmission electron microscopy studies reveal the formation of a direct InP-Si heterointerface by CELOG without threading dislocations. While CELOG is shown to avoid dislocations that could arise due to the large lattice mismatch (8%) between InP and Si, staking faults could be seen in the layer. These are probably created by the surface roughness of the Si surface or SiO2 mask which in turn would have been a consequence of the initial process treatments. The direct InP-Si heterointerface can find applications in high efficiency and cost-effective Si based III-V semiconductor multijunction solar cells and optoelectronics integration.

Place, publisher, year, edition, pages
2015. Vol. 48, no 4, p. 045102-
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:kth:diva-145363DOI: 10.1088/0022-3727/48/4/045102ISI: 000348300900003Scopus ID: 2-s2.0-84921046568OAI: oai:DiVA.org:kth-145363DiVA, id: diva2:718034
Funder
Swedish Research CouncilSwedish Energy AgencyVINNOVA
Note

Updated from "Pre-print" to "Article in journal". QC 20150227

Available from: 2014-05-19 Created: 2014-05-19 Last updated: 2017-12-05Bibliographically approved
In thesis
1. High Quality III-V Semiconductors/Si Heterostructures for Photonic Integration and Photovoltaic Applications
Open this publication in new window or tab >>High Quality III-V Semiconductors/Si Heterostructures for Photonic Integration and Photovoltaic Applications
2014 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

This thesis deals with one of the promising strategies to monolithically integrate III-V semiconductors with silicon via epitaxial lateral overgrowth (ELOG) technology and is supported by extensive experimental results. The aimed applications are light sources on silicon for electronics-photonics integration and cost effective high efficiency multijunction solar cells.

The work focusses on the growth of III-V semiconductors consisting of indium phosphide (InP) and its related alloys on silicon primarily because of the bandgaps that these offer for the aimed applications. For this purpose, we make use of the epitaxial growth technique called hydride vapour phase epitaxy and exploit its near equilibrium operation capability to achieve primarily ELOG of high quality InP as the starting material on patterned InP(seed)/silicon wafer. The InP/InGaAsP layers are grown by metal organic vapour phase epitaxy.

Different pattern designs are investigated to achieve high quality InP over a large area of silicon by ELOG to realise lasers. First, nano patterns designed to take advantage of aspect ratio trapping of defects are investigated. Despite substantial defect filtering insufficient growth area is achieved. To achieve a larger area, coalescence from multiple nano openings is used. Shallowly etched InP/InGaAsP based microdisk resonators fabricated on indium phosphide on silicon achieved by this method have shown whispering gallery modes. However, no lasing action is observed partly due to the formation of new defects at the points of coalescence and partly due to leakage losses due to shallow etching. To overcome these limitations, a new design mimicking the futuristic monolithic evanescently coupled laser design supporting an efficient mode coupling and athermal operation is adopted to yield large areas of ELOG InP/Si having good carrier transport and optical properties. Microdisk resonators fabricated from the uniformly obtained InP/InGaAsP structures on the ELOG InP layers have shown very strong spontaneous luminescence close to lasing action. This is observed for the first time in InP/InGaAsP laser structures grown on ELOG InP on silicon.

A newly modified ELOG approach called Corrugated ELOG is also developed. Transmission electron microscopy analyses show the formation of abrupt interface between InP and silicon. Electrical measurements have supported the linear Ohmic behaviour of the above junction. This proof of concept can be applied to even other III-V compound solar cells on silicon. This allows only thin layers of expensive III-V semiconductors and cheap silicon as separate subcells for fabricating next generation multijunction solar cells with enhanced efficiencies at low cost. A feasible device structure of such a solar cell is presented. The generic nature of this technique also makes it suitable for integration of III-V light sources with silicon and one such design is proposed.

 

Place, publisher, year, edition, pages
Stockholm: KTH Royal Institute of Technology, 2014. p. ix, 61
Series
TRITA-ICT/MAP AVH, ISSN 1653-7610
National Category
Nano Technology Telecommunications Other Materials Engineering
Identifiers
urn:nbn:se:kth:diva-153946 (URN)978-91-7595-289-5 (ISBN)
Public defence
2014-10-31, SAL A, Electrum, Isafjordsgatan 22, Kista, 10:00 (English)
Opponent
Supervisors
Note

QC 20141010

Available from: 2014-10-10 Created: 2014-10-10 Last updated: 2014-10-10Bibliographically approved
2. New Methods in the growth of InP on Si and Regrowth of Semi-insulating InP for Photonic Devices
Open this publication in new window or tab >>New Methods in the growth of InP on Si and Regrowth of Semi-insulating InP for Photonic Devices
2014 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

This thesis addresses new methods in the growth of indium phosphide on silicon for enabling silicon photonics and nano photonics as well as efficient and cost-effective solar cells. It also addresses the renewal of regrowth of semi-insulating indium phosphide for realizing buried heterostructure quantum cascade lasers with high power and wall plug efficiency for sensing applications.

As regards indium phosphide on silicon, both crystalline and polycrystalline growth methods are investigated. The crystalline growth methods are: (i) epitaxial lateral overgrowth to realize large area InP on Si, for silicon photonics (ii) a modified epitaxial lateral overgrowth method, called corrugated epitaxial lateral overgrowth, to obtain indium phosphide/silicon heterointerface for efficient and cost effective solar cells and (iii) selective growth of nanopyramidal frusta on silicon for nanophotonics. The polycrystalline growth method on silicon for low cost solar cell fabrication has been realized via (i) phosphidisation of indium oxide coating synthesized from solution chemistry and (ii) phosphidisation cum growth on indium metal on silicon. All our studies involve growth, growth analysis and characterization of all the above crystalline and polycrystalline layers and structures.

After taking into account the identified defect filtering mechanisms, we have implemented means of obtaining good optical quality crystalline layers and structures in our epitaxial growth methods. We have also identified feasible causes for the persistence of certain defects such as stacking faults. The novel methods of realizing indium phosphide/silicon heterointerface and nanopyramidal frusta of indium phosphide on silicon are particularly attractive for several applications other than the ones mentioned here.

Both the polycrystalline indium phosphide growth methods result in good optical quality material on silicon. The indium assisted phosphidisation cum growth method normally results in larger grain size indium phosphide than the one involving phosphidisation of indium oxide. These two methods are generic and can be optimized for low cost solar cells of InP on any flexible substrate.

The method of regrowth of semi-insulating indium phosphide that is routinely practiced in the fabrication of buried heterostructure telecom laser has been implemented for quantum cascade lasers. The etched ridges of the latter can be 6-15 µm deep, which is more than 2-3 times as those of the former. Although this is a difficult task, through our quick and flexible regrowth method we have demonstrated buried heterostructure quantum cascade lasers with an output power up to 2. 5 W and wall plug efficiency up to 9% under continuous operation.

Place, publisher, year, edition, pages
Stockholm: KTH Royal Institute of Technology, 2014. p. xi, 84
Series
TRITA-ICT/MAP AVH, ISSN 1653-7610 ; 2014:10
National Category
Engineering and Technology Nano Technology
Identifiers
urn:nbn:se:kth:diva-145375 (URN)978-91-7595-157-7 (ISBN)
Public defence
2014-06-12, Sal E, Forum, Isafjordsgatan 39, Kista, 10:00 (English)
Opponent
Supervisors
Note

QC 20140523

Available from: 2014-05-23 Created: 2014-05-19 Last updated: 2014-12-18Bibliographically approved

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