Amorphous carbon active contact layer for reliable nanoelectromechanical switches
2014 (English)In: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE conference proceedings, 2014, 143-146 p.Conference paper (Refereed)
This paper reports an amorphous carbon (a-C) contact coating for ultra-low-ower curved nanoelectromechanical (NEM) switches. a-C addresses important problems in miniaturization and low-ower operation of mechanical relays: i) the surface energy is lower than that of metals, ii) active formation of highly localized a-C conducting filaments offers a way to form nanoscale contacts, and iii) high reliability is achieved through the excellent wear properties of a-C, demonstrated in this paper with more than 100 million hot switching cycles. Finally, a full inverter using a-C contacts is fabricated to demonstrate the viability of the concept.
Place, publisher, year, edition, pages
IEEE conference proceedings, 2014. 143-146 p.
, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ISSN 1084-6999
Amorphous carbon, Amorphous carbon (a-C), Conducting filament, High reliability, Mechanical relays, Nano-electromechanical, Nanoelectromechanical switches, Nanoscale contacts, Switching cycles, MEMS
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject Electrical Engineering
IdentifiersURN: urn:nbn:se:kth:diva-145507DOI: 10.1109/MEMSYS.2014.6765594ISI: 000352217500037ScopusID: 2-s2.0-84899003478ISBN: 978-147993508-6OAI: oai:DiVA.org:kth-145507DiVA: diva2:718448
27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26 January 2014 - 30 January 2014, San Francisco, CA
QC 201405212014-05-212014-05-212015-08-07Bibliographically approved