Biaxial strain in suspended graphene membranes for piezoresistive sensing
2014 (English)In: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE , 2014, 1055-1058 p.Conference paper (Refereed)
Pressure sensors based on suspended graphene membranes have shown extraordinary sensitivity for uniaxial strains, which originates from graphene's unique electrical and mechanical properties and thinness . This work compares through both theory and experiment the effect of cavity shape and size on the sensitivity of piezoresistive pressure sensors based on suspended graphene membranes. Further, the paper analyzes the effect of both biaxial and uniaxial strain on the membranes. Previous studies examined uniaxial strain through the fabrication of long, rectangular cavities. The present work uses circular cavities of varying sizes in order to obtain data from biaxially strained graphene membranes.
Place, publisher, year, edition, pages
IEEE , 2014. 1055-1058 p.
, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ISSN 1084-6999
Membranes, MEMS, Pressure sensors, Strain, Biaxial strains, Electrical and mechanical properties, Piezoresistive pressure sensors, Piezoresistive sensing, Rectangular cavity, Strained graphene, Suspended graphene, Uni-axial strains, Graphene
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-145475DOI: 10.1109/MEMSYS.2014.6765826ISI: 000352217500269ScopusID: 2-s2.0-84898971449ISBN: 978-147993508-6OAI: oai:DiVA.org:kth-145475DiVA: diva2:718604
27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014; San Francisco, CA; United States; 26 January 2014 through 30 January 2014
QC 201405212014-05-212014-05-212016-06-10Bibliographically approved