Formation of pn junctions in deep silicon pores for X-ray imaging detector applications
2003 (English)In: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, ISSN 0168-9002, Vol. 509, no 1-3, 96-101 p.Article in journal (Refereed) Published
The formation of pn junctions in deep silicon pores has been studied for a new concept of X-ray imaging detectors. The sensitive part of the device is an array of CsI(Tl) columns formed by filling a silicon matrix of pores having pn junctions in their walls. Under X-ray illumination, the CsI(TI) scintillator emits photons that are collected by the pn junctions. Relatively high signal collection efficiency is expected. However, the formation of pn junctions inside pore walls represents a challenging step in the detector fabrication. In this work pore matrices were fabricated in n-type silicon by deep reactive ion etching and by photo-electrochemical etching. The pn junctions were formed either by boron diffusion or deposition of boron doped poly-silicon. Various techniques were used to analyze the transverse depth profiles of boron atoms at different pore depths. The study shows successful results for pn-junctions formed both by diffusion and by poly-silicon deposition.
Place, publisher, year, edition, pages
2003. Vol. 509, no 1-3, 96-101 p.
pn junction, SCM, SEM, Silicon macropores, SIMS, SSRM, Photons, Porosity, Semiconductor junctions, X rays, X-ray imaging detectors, Radiation detectors
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-4961DOI: 10.1016/S0168-9002(03)01556-0ISI: 000185047700017OAI: oai:DiVA.org:kth-4961DiVA: diva2:7218
QC 201008312005-03-032005-03-032010-08-31Bibliographically approved