Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Integrating 3D PIN germanium detectors with high-k ALD fabricated slot waveguides
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.ORCID iD: 0000-0001-6459-749X
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.ORCID iD: 0000-0002-5845-3032
2014 (English)In: ULIS 2014 - 2014 15th International Conference on Ultimate Integration on Silicon, IEEE Computer Society, 2014, 45-48 p.Conference paper, Published paper (Refereed)
Abstract [en]

A novel device technology for photonics integrated circuits (PICs) is presented. In this work germanium PIN photodetectors are embedded in back-end deposited high-k slot waveguides. The waveguides are fabricated using chemical vapor deposited amorphous silicon and atomic layer deposition of Al 2O3 thin films. The germanium PIN stack is selectively grown on a bulk silicon substrate. The detectors are butt coupled to the slot waveguides. Using our selective germanium growth and interconnect technology we study a 3D multilayer photonic integration for CMOS back-end of the line (BEOL) process. Finally we demonstrate the fabrication of a photonic chip deploying this technology platform.

Place, publisher, year, edition, pages
IEEE Computer Society, 2014. 45-48 p.
Keyword [en]
CMOS technology, germanium photodetectors, optical interconnects, photonics integrated circuits(PIC), silicon photonics, slot waveguides
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-146703DOI: 10.1109/ULIS.2014.6813902ISI: 000341731300012Scopus ID: 2-s2.0-84901355177OAI: oai:DiVA.org:kth-146703DiVA: diva2:724782
Conference
2014 15th International Conference on Ultimate Integration on Silicon, ULIS 2014; Stockholm; Sweden; 7 April 2014 through 9 April 2014
Note

QC 20140613

Available from: 2014-06-13 Created: 2014-06-13 Last updated: 2014-11-14Bibliographically approved
In thesis
1. Horizontal Slot Waveguides for Silicon Photonics Back-End Integration
Open this publication in new window or tab >>Horizontal Slot Waveguides for Silicon Photonics Back-End Integration
2014 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

This thesis presents the development of integrated silicon photonic devices. These devices are compatible with the present and near future CMOS technology. High-khorizontal grating couplers and waveguides are proposed. This work consists of simulations and device design, as well as the layout for the fabrication process, device fabrication, process development, characterization instrument development and electro-optical characterizations.

The work demonstrates an alternative solution to costly silicon-on-insulator photonics. The proposed solution uses bulk silicon wafers and thin film deposited waveguides. Back-end deposited horizontal slot grating couplers and waveguides are realized by multi-layers of amorphous silicon and high-k materials.

The achievements of this work include: A theoretical study of fully etched slot grating couplers with Al2O3, HfO2 and AIN, an optical study of the high-k films with spectroscopic ellipsometry, an experimental demonstration of fully etched SiO2 single slot grating couplers and double slot Al2O3 grating couplers, a practical demonstration of horizontal double slot high-k waveguides, partially etched Al2O3 single slot grating couplers, a study of a scheme for integration of the double slot Al2O3  waveguides with selectively grown germanium PIN photodetectors, realization of test chips for the integrated germanium photodetectors, and study of integration with graphene photodetectors through embedding the graphene into a high-k slot layer.

From an application point of view, these high-k slot waveguides add more functionality to the current silicon photonics. The presented devices can be used for low cost photonics applications. Also alternative optical materials can be used in the context of this photonics platform.

With the robust design, the grating couplers result in improved yield and a more cost effective solution is realized for integration of the waveguides with the germanium and graphene photodetectors.

 

 

 

 

Place, publisher, year, edition, pages
Stockholm: KTH Royal Institute of Technology, 2014. xiii, 90 p.
Series
TRITA-ICT/MAP AVH, ISSN 1653-7610 ; 2014:17
Keyword
silicon photonics, slot waveguides, grating couplers, CMOS tech- nology, high-k, ALD, germanium photodetectors, graphene photodetectors, pho- tonic integrated circuits
National Category
Nano Technology Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-155732 (URN)978-91-7595-340-3 (ISBN)
Public defence
2014-12-05, Sal/hall A, Electrum, KTH-ICT, Kista, 10:00 (English)
Opponent
Supervisors
Note

QC 20141114

Available from: 2014-11-14 Created: 2014-11-11 Last updated: 2016-12-01Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textScopus

Authority records BETA

Malm, Gunnar

Search in DiVA

By author/editor
Naiini, Maziar M.Radamson, Henry H.Malm, GunnarÖstling, Mikael
By organisation
Integrated Devices and Circuits
Other Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 55 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf