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Silicon nanofabrication by electron beam lithography and laser assisted electrochemical etching
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.
2002 (English)Licentiate thesis, comprehensive summary (Other scientific)
Place, publisher, year, edition, pages
Kista: Mikroelektronik och informationsteknik , 2002. , vi, 35 p.
Trita-FTE, ISSN 0284-0545 ; 2002:1
URN: urn:nbn:se:kth:diva-1397OAI: diva2:7249
NR 20140805Available from: 2002-03-20 Created: 2002-03-20Bibliographically approved

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