Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Fabrication and Design of 10 kV PiN Diodes Using On-axis 4H-SiC
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.ORCID iD: 0000-0002-7510-9639
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.ORCID iD: 0000-0002-8760-1137
Show others and affiliations
2014 (English)In: Materials Science Forum, ISSN 0255-5476, E-ISSN 1662-9752, Vol. 778-780, 836-840 p.Article in journal (Refereed) Published
Abstract [en]

10 kV PiN diodes using on-axis 4H-SiC were designed, fabricated, and measured. A lifetime enhancement procedure was done by carbon implantation followed by high temperature annealing to increase lifetime to above 2 mu s. The device simulation software Sentaurus TCAD has been used in order to optimize the diode. All fabricated diodes are fully functional and have a V-F of 3.3 V at 100 A/cm(2) at 25 degrees C, which was decreased to 3.0 V at 300 degrees C.

Place, publisher, year, edition, pages
2014. Vol. 778-780, 836-840 p.
Keyword [en]
On-axis 4H-SiC, PiN Diode, lifetime enhancement, V-F
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:kth:diva-147446DOI: 10.4028/www.scientific.net/MSF.778-780.836ISI: 000336634100198Scopus ID: 2-s2.0-84896089454ISBN: 978-3-03835-010-1 (print)OAI: oai:DiVA.org:kth-147446DiVA: diva2:730217
Conference
15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), SEP 29-OCT 04, 2013, Miyazaki, JAPAN
Note

QC 20140627. QC 20160304

Available from: 2014-06-27 Created: 2014-06-27 Last updated: 2017-12-05Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textScopus

Authority records BETA

Salemi, ArashHallén, AndersZetterling, Carl Mikael

Search in DiVA

By author/editor
Salemi, ArashBuono, BenedettoHallén, AndersZetterling, Carl MikaelÖstling, Mikael
By organisation
Integrated Devices and Circuits
In the same journal
Materials Science Forum
Materials Engineering

Search outside of DiVA

GoogleGoogle Scholar

doi
isbn
urn-nbn

Altmetric score

doi
isbn
urn-nbn
Total: 86 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf