Silicon nanopillar arrays with SiO2 overlayer for biosensing application
2014 (English)In: Optical Materials Express, ISSN 2159-3930, Vol. 4, no 7, 1345-1354 p.Article in journal (Refereed) Published
We present the fabrication of silicon dioxide (SiO2) coated silicon nanopillar array structures and demonstrate their application as sensitive optical biosensors. Colloidal lithography, plasma dry etching and deposition processes are used to fabricate SiO2 coated Si nanopillar arrays with two different diameters and periods. Proof of concept bio recognition experiments are carried out with the bovine serum albumin (BSA)/antiBSA model system using Fourier transform visible and IR spectrometry (FT-VIS-IR) in reflection mode. A limit of detection (LoD) value of 5.2 ng/ml is estimated taking in to account the wavenumber uncertainty in the measurements.
Place, publisher, year, edition, pages
2014. Vol. 4, no 7, 1345-1354 p.
Optical Biosensors, Lithography, Fabrication, Nanowires, Sensor
Engineering and Technology
IdentifiersURN: urn:nbn:se:kth:diva-148624DOI: 10.1364/OME.4.001345ISI: 000338875100007ScopusID: 2-s2.0-84903976142OAI: oai:DiVA.org:kth-148624DiVA: diva2:737284
FunderSwedish Research CouncilEU, FP7, Seventh Framework Programme
QC 201408122014-08-122014-08-112016-04-07Bibliographically approved