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Localized 56Fe+ ion implantation of TiO2 using anodic porous alumina
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2010 (English)In: Ion beams and nano-engineering, Materials Research Society, 2010, 3-8 p.Conference paper (Refereed)
Abstract [en]

We present result following localized ion implantation of rutile titanium dioxide (TiC2) using anodic porous alumina as a mask. The implantation were performed with 100 keV 56Fe+ ions using a fluence of 1.3-1016 ions/cm2. The surface modifications where studied by means of SEM, AFM/MFM and XRD. A well-defined hexagonal pattern of modified material in the near surface structure is observed. Local examination of the implanted areas revealed no clear magnetic signal. However, a variation in mechanical and electrostatic behavior between implanted and non-implanted zones is inferred from the variation in AFM signals.

Place, publisher, year, edition, pages
Materials Research Society, 2010. 3-8 p.
, Materials Research Society Symposium Proceedings, ISSN 0272-9172 ; 1181
Keyword [en]
AFM, Anodic porous alumina, Fluences, Hexagonal pattern, Implanted zones, Magnetic signals, Near-surface, SEM, Surface modification, TiO, XRD, Oxide minerals, Surface structure, Titanium, Titanium carbide, Titanium dioxide, Ion implantation
National Category
Materials Engineering
URN: urn:nbn:se:kth:diva-149411ScopusID: 2-s2.0-77952379551ISBN: 978-160511154-4OAI: diva2:739653
2009 MRS Spring Meeting, 14 April 2009 through 17 April 2009, San Francisco, CA, United States

QC 20140821

Available from: 2014-08-21 Created: 2014-08-21 Last updated: 2014-08-21Bibliographically approved

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Hallén, Anders
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Microelectronics and Applied Physics, MAP
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