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3D fabrication of waveguide and grating coupler in SU-8 by optimized gray scale electron beam lithography
KTH, School of Information and Communication Technology (ICT), Optics and Photonics (Closed 20120101), Optics (Closed 20120101).
KTH, School of Information and Communication Technology (ICT), Optics and Photonics (Closed 20120101), Optics (Closed 20120101).
KTH, School of Information and Communication Technology (ICT), Optics and Photonics (Closed 20120101), Optics (Closed 20120101).
KTH, School of Information and Communication Technology (ICT), Optics and Photonics (Closed 20120101), Optics (Closed 20120101).
2010 (English)In: 2010 Asia Communications and Photonics Conference and Exhibition, ACP 2010, 2010, 542-543 p.Conference paper, Published paper (Refereed)
Abstract [en]

Gray scale electron beam lithography is optimized for simple and accurate prototyping of 3D waveguides and grating output couplers in SU-8. Gratings with complex profiles and free of lag effect can be realized with this technique.

Place, publisher, year, edition, pages
2010. 542-543 p.
Keyword [en]
3D fabrication, Complex profiles, Grating couplers, Gray scale, Lag effects, Output couplers, Prototyping, Electron beam lithography, Electron beams, Optimization, Three dimensional, Waveguides, Photonics
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Other Physics Topics
Identifiers
URN: urn:nbn:se:kth:diva-150028DOI: 10.1109/ACP.2010.5682619Scopus ID: 2-s2.0-79851470828ISBN: 978-142447111-9 (print)OAI: oai:DiVA.org:kth-150028DiVA: diva2:742245
Conference
Asia Communications and Photonics Conference and Exhibition, ACP 2010, 8 December 2010 through 12 December 2010, Shanghai, China
Note

QC 20140901

Available from: 2014-09-01 Created: 2014-08-29 Last updated: 2014-09-01Bibliographically approved

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CiteExportLink to record
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Citation style
  • apa
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  • vancouver
  • Other style
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Language
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  • nn-NB
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  • Other locale
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Output format
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  • asciidoc
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