Demonstration of a quick process to achieve buried heterostructure quantum cascade laser leading to high power and wall plug efficiency
2014 (English)In: Optical Engineering: The Journal of SPIE, ISSN 0091-3286, E-ISSN 1560-2303, Vol. 53, no 8, 087104- p.Article in journal (Refereed) Published
Together with the optimal basic design, buried heterostructure quantum cascade laser (BH-QCL) with semi-insulating regrowth offers a unique possibility to achieve an effective thermal dissipation and lateral single mode. We demonstrate here the realization of BH-QCLs with a single-step regrowth of highly resistive (>1 x 10(8) ohm . cm) semi-insulating InP: Fe in <45 min for the first time in a flexible hydride vapor phase epitaxy process for burying ridges etched down to 10 to 15 mu m depth, both with and without mask overhang. The fabricated BH-QCLs emitting at similar to 4.7 and similar to 5.5 mu m were characterized. 2-mm-long 5.5-mu m lasers with a ridge width of 17 to 22 mu m, regrown with mask overhang, exhibited no leakage current. Large width and high doping in the structure did not permit high current density for continuous wave (CW) operation. 5-mm-long 4.7-mu m BH-QCLs of ridge widths varying from 6 to 14 mu m regrown without mu mask overhang, besides being spatially monomode, TM00, exhibited wall plug efficiency (WPE) of similar to 8 to 9% with an output power of 1.5 to 2.5 W at room temperature and under CW operation. Thus, we demonstrate a quick, flexible, and single-step regrowth process with good planarization for realizing buried QCLs leading to monomode, high power, and high WPE.
Place, publisher, year, edition, pages
2014. Vol. 53, no 8, 087104- p.
buried heterostructure quantum cascade lasers, high-power, high wall plug efficiency quantum cascade laser, hydride vapor phase epitaxy regrowth
Other Physics Topics
IdentifiersURN: urn:nbn:se:kth:diva-150934DOI: 10.1117/1.OE.53.8.087104ISI: 000341195300052ScopusID: 2-s2.0-84904759280OAI: oai:DiVA.org:kth-150934DiVA: diva2:746206
FunderEU, FP7, Seventh Framework Programme, 317884
QC 20140912. Updated from manuscript to published article. Previous title "Demonstration of a quick process to achieve buried heterostructure QCL leading to high power and wall plug efficiency".2014-09-122014-09-112014-10-27Bibliographically approved