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Study of the interface properties of TiO 2/SiO 2/SiC by photocapacitance
KTH, School of Information and Communication Technology (ICT). [Newcastle Univ, Sch Elect Elect & Comp Engn, England.
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2011 (English)In: 8th European Conference on Silicon Carbide and Related Materials, ECSCRM 2010, 2011, 350-353 p.Conference paper, Published paper (Refereed)
Abstract [en]

We have investigated the annealing of fixed oxide charge and interfacial traps in MISiC strucures by means of the photo capacitance voltage technique at temperatures up to 500°C. Elevated temperature measurements show reduced hysteresis and reduced fixed oxide charge at the interface. The photo capacitance technique shows a real-time measurement at elevated temperatures, in which electrons are populated by photo energy, in a 4H-SiC MIS structure. We also confirm the reduction of fixed oxide charge at the interface by means of high temperature post deposition annealing, which occurs during the high temperature measurements.

Place, publisher, year, edition, pages
2011. 350-353 p.
Series
Materials Science Forum, ISSN 0255-5476 ; 679/680
Keyword [en]
High κ dielectric, Interface state density, Interface trap, Ledge, MISiC, Capacitance-voltage techniques, Elevated temperature, High temperature, High temperature measurement, Interface property, Interfacial traps, MIS structure, Oxide charge, Photo energy, Photocapacitance, Post deposition annealing, Real time measurements, TiO, Capacitance, Heterojunctions, Silicon carbide, Silicon oxides, Temperature measurement
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-151228DOI: 10.4028/www.scientific.net/MSF.679-680.350ISI: 000291673500083Scopus ID: 2-s2.0-84953407994ISBN: 9783037850794 (print)OAI: oai:DiVA.org:kth-151228DiVA: diva2:747721
Conference
29 August 2010 through 2 September 2010, Oslo
Note

QC 20140917

Available from: 2014-09-17 Created: 2014-09-15 Last updated: 2014-09-17Bibliographically approved

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
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  • asciidoc
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