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Compacted nanoscale sensors by merging ZnO nanorods with interdigitated electrodes
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2011 (English)In: Proc SPIE Int Soc Opt Eng, 2011Conference paper (Refereed)
Abstract [en]

ZnO nanorods (NRs) sensors utilizing hybrid or monolithic integration of the NRs on nanoscale or microscale interdigitated electrodes (IDEs) were fabricated and characterized. The IDEs with their finger electrode width ranging from 50 nm to 3 μm were formed on SiO2/Si substrates by nanoimprint lithography or conventional photolithography and metallization techniques, whereas the ZnO NRs were grown by chemical synthesis method. The average diameter of the ZnO NRs is about 100 nm, and their length can be varied from 2 to 5 μm by controlling growth time. When sensing targets, such as molecules or nanoparticles, bind onto the ZnO NRs, the conductance between IDEs will change. As probing test, II-VI quantum dots (QDs) were attached on the ZnO NRs, and clear responses were obtained by measuring and comparing current-voltage (I-V) characteristic of the sensor before and after binding the QDs.

Place, publisher, year, edition, pages
, Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X ; 8031
Keyword [en]
chemical synthesis, interdigitated electrodes and nanoimprint lithography, ZnO nanorods, Average diameter, Conventional photolithography, Finger electrode, Growth time, II-VI quantum dots, Inter-digitated electrodes, Metallization techniques, Micro-scales, Monolithic integration, Nano scale, Nanoscale sensors, ZnO, ZnO nanorod, Electrodes, Monolithic integrated circuits, Nanoimprint lithography, Nanorods, Nanostructured materials, Nanotechnology, Photolithography, Semiconductor quantum dots, Silicon compounds, Synthesis (chemical), Zinc oxide, Sensors
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Other Physics Topics Other Electrical Engineering, Electronic Engineering, Information Engineering
URN: urn:nbn:se:kth:diva-151207DOI: 10.1117/12.883365ISI: 000291441400079ScopusID: 2-s2.0-79958003711ISBN: 9780819486059OAI: diva2:748426
Micro- and Nanotechnology Sensors, Systems, and Applications III, 25 April 2011 through 29 April 2011, Orlando, FL

QC 20140919

Available from: 2014-09-19 Created: 2014-09-15 Last updated: 2014-09-19Bibliographically approved

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Sugunan, AbhilashYang, XuranToprak, Muhammet
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Functional Materials, FNM (Closed 20120101)
Other Physics TopicsOther Electrical Engineering, Electronic Engineering, Information Engineering

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