Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Micro-ring resonantors fabricated by focused-ion-beam on SOI
KTH, School of Information and Communication Technology (ICT), Materials- and Nano Physics, Optics and Photonics, OFO.
KTH, School of Information and Communication Technology (ICT), Materials- and Nano Physics, Optics and Photonics, OFO.
2008 (English)In: Proceedings of SPIE - The International Society for Optical Engineering, 2008Conference paper, Published paper (Refereed)
Abstract [en]

We present the fabrication of the micro-ring resonators on SOI substrate by directly focused-ion-beam (FIB) milling. Micro-ring resonators with diameters of 10 μm and 80 μm are fabricated and their corresponding intrinsic Q factors are 1,400 and 7,400, respectively.

Place, publisher, year, edition, pages
2008.
Series
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X ; 7136
Keyword [en]
Focused-ion-beam, Ring resonators, Micro rings, Micro-ring resonators, Q factors, Soi substrates, Comminution, Fabrication, Ion beams, Ions, Light transmission, Optical resonators, Resonators
National Category
Other Physics Topics
Identifiers
URN: urn:nbn:se:kth:diva-154186DOI: 10.1117/12.803132Scopus ID: 2-s2.0-62549144889OAI: oai:DiVA.org:kth-154186DiVA: diva2:755624
Conference
Optical Transmission, Switching, and Subsystems VI, 27 October 2008 through 30 October 2008, Hangzhou
Note

QC 20141015

Available from: 2014-10-15 Created: 2014-10-14 Last updated: 2014-10-15Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textScopus

Search in DiVA

By author/editor
Tian, JieQiu, Min
By organisation
Optics and Photonics, OFO
Other Physics Topics

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 5 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf