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Comment on "oxidation of alloys containing aluminum and diffusion in Al2 O3 " [J. Appl. Phys. 95, 3217 (2004)]
KTH, School of Information and Communication Technology (ICT), Microelectronics and Information Technology, IMIT.
2005 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 97, no 11, 116109- p.Article in journal, Editorial material (Refereed) Published
Abstract [en]

The introduction of AlO as the diffusing species can be seen as an attempt to bridge the gap between the two scientific communities: those working on the oxidation of metals and those working on the oxidation of silicon. The attempt is, however, not successful and would have been more successful if the Wagner theory [O. Wagner, Z. Phys. Chem. Abt. B 21, 25 (1993)] would have been used to evaluate the mechanisms. There is also a lack of agreement with the two-stage oxidation experiment, oxidation first in O-16 and then in O-18. The experimental O-18 profile in the oxides formed cannot be explained by the diffusion of AlO, so it is unlikely that AlO is the diffusing species during oxidation.

Place, publisher, year, edition, pages
2005. Vol. 97, no 11, 116109- p.
Keyword [en]
Thermal-Oxidation, Silicon
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Other Physics Topics
URN: urn:nbn:se:kth:diva-156706DOI: 10.1063/1.1923608ISI: 000229804700156ScopusID: 2-s2.0-20544453551OAI: diva2:767669

QC 20141202

Available from: 2014-12-02 Created: 2014-12-02 Last updated: 2014-12-02Bibliographically approved

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Åkermark, Torbjörn
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