Wide continuously tunable 1.55 μm vertical air-cavity wavelength selective elements for filters and VCSELs using micromachined actuation
2005 (English)In: Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks, SPIE - International Society for Optical Engineering, 2005, 14-28 p.Conference paper (Refereed)
Tailored scaling allows the effectiveness of physical effects and mechanical stability to be enhanced. This is shown for micromachined 1.55μm vertical-resonator-based filters and VCSELs, capable of wide, continuous, and kink-free tuning by a single control parameter. Tuning is achieved by mechanically actuating one or several membranes in a vertical air-gap resonator including two highly reflective DBR mirrors. Electrostatically actuatable single-chip filters including InP/air-gap DBR's (3.5 periods) reveal a continuous tuning up to 14% of the absolute wavelength. Varying a reverse voltage (U=0 .. -3.2V) between the membranes (almost flat in the unactuated condition) a tuning range up to 142nm was obtained. Varying a reverse voltage (U=0 .. -28V) between the membranes (strained and curved in the unactuated condition) a tuning range up to 221nm was obtained. Optically pumped and continuously tunable 1.55μm VCSELs show 26nm spectral tuning range, 400μW maximum output power, and 57dBm SMSR. This two-chip VCSEL has a movable top mirror membrane, which is precisely designed to obtain a specific air-gap length and a tailored radius of curvature in order to efficiently support the fundamental optical mode of the plane-concave resonator. The curved top mirror DBR membrane consists of periodically alternating differently stressed silicon nitride and silicon dioxide multilayers. The lower InP-based part consists of the InP/GaInAsP bottom DBR and the GaInAsP active region.
Place, publisher, year, edition, pages
SPIE - International Society for Optical Engineering, 2005. 14-28 p.
, Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X ; 5825
Analytics and confocal microscopy, Application in dense wavelength division multiplexing, sensorics, Electrostatic and thermal tuning, Filters, Optical MEMS, Surface micromachining, VCSELs, Vertical optical micro-cavities
Electrical Engineering, Electronic Engineering, Information Engineering Telecommunications
IdentifiersURN: urn:nbn:se:kth:diva-156659DOI: 10.1117/12.611337ISI: 000231201000002ScopusID: 2-s2.0-27644515398ISBN: 0-8194-5810-4OAI: oai:DiVA.org:kth-156659DiVA: diva2:768455
Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks, 4 April 2005 through 6 April 2005, Dublin, Ireland
QC 201412042014-12-042014-12-022014-12-04Bibliographically approved