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Characterization of gold nanoparticle films: Rutherford backscattering spectroscopy, scanning electron microscopy with image analysis, and atomic force microscopy
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.ORCID iD: 0000-0002-8760-1137
2014 (English)In: AIP Advances, ISSN 2158-3226, E-ISSN 2158-3226, Vol. 4, no 10, 107101- p.Article in journal (Refereed) Published
Abstract [en]

Gold nanoparticle films are of interest in several branches of science and technology, and accurate sample characterization is needed but technically demanding. We prepared such films by DC magnetron sputtering and recorded their mass thickness by Rutherford backscattering spectroscopy. The geometric thickness d(g)-from the substrate to the tops of the nanoparticles-was obtained by scanning electron microscopy (SEM) combined with image analysis as well as by atomic force microscopy (AFM). The various techniques yielded an internally consistent characterization of the films. In particular, very similar results for d(g) were obtained by SEM with image analysis and by AFM.

Place, publisher, year, edition, pages
2014. Vol. 4, no 10, 107101- p.
Keyword [en]
Atomic force microscopy, Backscattering, Characterization, Electron microscopy, Gold, Image analysis, Magnetrons, Metal nanoparticles, Metallic films, Nanoparticles, Rutherford backscattering spectroscopy AFM, Characterization of the films, Dc magnetron sputtering, Gold nanoparticle films, Mass thickness, Science and Technology
National Category
Nano Technology Other Physics Topics
Identifiers
URN: urn:nbn:se:kth:diva-157624DOI: 10.1063/1.4897340ISI: 000344588200002Scopus ID: 2-s2.0-84907841714OAI: oai:DiVA.org:kth-157624DiVA: diva2:770815
Funder
EU, FP7, Seventh Framework Programme, 267234
Note

QC 20141211

Available from: 2014-12-11 Created: 2014-12-11 Last updated: 2017-12-05Bibliographically approved

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Hallén, Anders

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