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SU8 ridge-gap waveguide resonator
KTH, School of Technology and Health (STH).ORCID iD: 0000-0002-9327-2544
2014 (English)In: International journal of microwave and wireless technologies, ISSN 1759-0795, E-ISSN 1759-0787, Vol. 6, no 5, 459-465 p.Article in journal (Refereed) Published
Abstract [en]

In this paper, we present the first ridge-gap waveguide resonator made with a polymer base. It is designed for the frequency range 220-325 GHz, and is fabricated solely using a Au coated two-layer SU8-based process. The design is based on previous work done with Si. The new process has advantages such as fewer and cheaper process steps. The SU8 ridge-gap waveguide resonator is made in order to obtain attenuation characteristics via the measured Q-factor of the resonator. The ridge-gap waveguide resonator has the same dimensions as the previous one fabricated in Si, and the same thickness of the Au coating. The SU8-based resonator shows an attenuation loss of 0.41 dB/mm at 282.2 GHz compared to the Si-based resonator with an attenuation loss of 0.043 dB/mm at 283.5 GHz. This makes the SU8 process a more cost-effective alternative to the Si process

Place, publisher, year, edition, pages
2014. Vol. 6, no 5, 459-465 p.
Keyword [en]
RF-MEMS and MOEMS, New and emerging technologies and materials
National Category
URN: urn:nbn:se:kth:diva-159034DOI: 10.1017/S1759078714000609ISI: 000346348200003ScopusID: 2-s2.0-84911961757OAI: diva2:785677
Swedish Research CouncilVINNOVA

QC 20150203

Available from: 2015-02-03 Created: 2015-01-20 Last updated: 2015-02-03Bibliographically approved

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Haasl, Sjoerd
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School of Technology and Health (STH)
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