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Surface roughening in ion implanted 4H-silicon carbide
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1999 (English)In: Journal of Electronic Materials, ISSN 0361-5235, E-ISSN 1543-186X, Vol. 28, no 3, 214-218 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1999. Vol. 28, no 3, 214-218 p.
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Engineering and Technology
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URN: urn:nbn:se:kth:diva-161289DOI: 10.1007/s11664-999-0016-zISI: 000079240000016OAI: oai:DiVA.org:kth-161289DiVA: diva2:794729
Conference
40th Electronic Materials Conference (EMC-40), JUN 24-26, 1998, UNIV VIRGINIA, CHARLOTTESVILLE, VIRGINIA
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NR 20150402

Available from: 2015-03-12 Created: 2015-03-11 Last updated: 2017-12-04Bibliographically approved

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Nordell, N

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