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Three-dimensional metrology of embedded microfeatures in ceramics by infrared optical coherence tomography – advantages and limitations
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics. (Industrial Metrology and Optics)ORCID iD: 0000-0003-0776-3716
(Laboratory of Biophotonics)
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics.
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics.ORCID iD: 0000-0002-0105-4102
2015 (English)In: The Proceedings of the 11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, European society for precision engineering & nanotechnology , 2015Conference paper, Published paper (Refereed)
Abstract [en]

Advanced printing, structuring, and lamination technologies allow for large-scale and cost-effective manufacturing of multi-layered ceramic micro devices with complex three-dimensional (3D) structures. Infrared (IR) optical coherence tomography (OCT) is a promising technology for rapid, non-contact, high-resolution, and 3D inspection of the microchannels, metal prints, defects, and delaminations embedded in alumina and zirconia ceramic layers at hundreds of micrometres beneath surfaces. In this study the recent progresses of OCT technology for ceramic materials are reviewed, and its advantages and limitations as a metrology tool are evaluated through experiments and Monte Carlo simulations. Several measurement errors of OCT are revealed and the measurement in lateral directions is significantly affected by scattering in the ceramics. Besides of that, two types of image artefacts are found to be present in OCT images due to multiple reflections between neighbouring boundaries and inhomogeneity of refractive index. A wavefront aberration exists in the OCT system with a scanning scheme of two galvo mirrors.

Place, publisher, year, edition, pages
European society for precision engineering & nanotechnology , 2015.
National Category
Nano Technology
Research subject
SRA - Production
Identifiers
URN: urn:nbn:se:kth:diva-164317Scopus ID: 2-s2.0-84947078815OAI: oai:DiVA.org:kth-164317DiVA: diva2:805635
Conference
the 11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, March 17 - 18, 2015
Funder
XPRES - Initiative for excellence in production research
Note

QC 20150512

Available from: 2015-04-15 Created: 2015-04-15 Last updated: 2016-03-14Bibliographically approved

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fulltext(858 kB)76 downloads
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Su, Rong

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