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Novel resonant micromachined silicon devices for fluid applications: densitometer, coriolis mass flow sensor and diffuser pump
KTH, Superseded Departments, Signals, Sensors and Systems.
1997 (English)Doctoral thesis, comprehensive summary (Other scientific)
Place, publisher, year, edition, pages
Stockholm: Signaler, sensorer och system , 1997. , 66 p.
URN: urn:nbn:se:kth:diva-2480ISBN: 99-2393776-3OAI: diva2:8070
Public defence
NR 20140805Available from: 2000-01-01 Created: 2000-01-01Bibliographically approved

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