500-600 GHz Submillimeter-Wave 3.3 bit RF MEMS Phase Shifter Integrated in Micromachined Waveguide
2015 (English)In: Microwave Symposium (IMS), 2015 IEEE MTT-S International, IEEE conference proceedings, 2015, 1-4 p.Conference paper (Refereed)
This paper presents a 500-600 GHz submillimeterwave MEMS-reconfigurable phase shifter. It is the first ever RF MEMS component reported to be operating above 220 GHz. The phase shifter is based on a micromachined rectangular waveguide which is loaded by 9 E-plane stubs, which can be individually blocked by using MEMS–reconfigurable surfaces. The phase-shifter is composed of three metallized silicon chips which are assembled in H-plane cuts of the waveguide. The measurement results of the first prototypes of the MEMS reconfigurable phase shifter show a linear phase shift of 20° in 10 steps (3.3 bit) and have a return loss better than 15 dB from 500-600 GHz. The insertion loss is better than 3 dB up to 540 GHz, and better than 5 dB up to 600 GHz for all phase states, of which the major part is contributed by the assembly of the microchips between waveguide flanges which has a reproducibility error between 2 and 6 dB measured for reference chips.
Place, publisher, year, edition, pages
IEEE conference proceedings, 2015. 1-4 p.
Micromachined waveguide, phase shifter, RF MEMS, rectangular waveguide, submillimeter-wave, terahertz
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-166117DOI: 10.1109/MWSYM.2015.7166829ISI: 000370722900126ScopusID: 2-s2.0-84946092478ISBN: 978-1-4799-8275-2OAI: oai:DiVA.org:kth-166117DiVA: diva2:809308
Microwave Symposium (IMS), 2015 IEEE MTT-S International, 17-22 May, 2015, Phoenix, USA
qc 201507282015-05-012015-05-012016-03-29Bibliographically approved