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Nucleation and growth of polycrystalline SiC
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.ORCID iD: 0000-0002-0292-224X
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2014 (English)In: IOP Conference Series: Materials Science and Engineering, 2014, no 1Conference paper (Refereed)
Abstract [en]

The nucleation and bulk growth of polycrystalline SiC in a 2 inch PVT setup using isostatic and pyrolytic graphite as substrates was studied. Textured nucleation occurs under near-thermal equilibrium conditions at the initial growth stage with hexagonal platelet shaped crystallites of 4H, 6H and 15R polytypes. It is found that pyrolytic graphite results in enhanced texturing of the nucleating gas species. Reducing the pressure leads to growth of the crystallites until a closed polycrystalline SiC layer containing voids with a rough surface is developed. Bulk growth was conducted at 35 mbar Ar pressure at 2250°C in diffusion limited mass transport regime generating a convex shaped growth form of the solid-gas interface leading to lateral expansion of virtually [001] oriented crystallites. Growth at 2350°C led to the stabilization of 6H polytypic grains. The micropipe density in the bulk strongly depends on the substrate used.

Place, publisher, year, edition, pages
2014. no 1
Keyword [en]
Crystallites, Energy gap, Graphite, Light emission, Nucleation, Phase interfaces, Solar cells, Substrates, Diffusion limited, Equilibrium conditions, Hexagonal platelets, Lateral expansion, Nucleation and growth, Polycrystalline SiC, Pyrolytic graphite, Solid-gas interface, Silicon carbide
National Category
Materials Engineering
URN: urn:nbn:se:kth:diva-167870DOI: 10.1088/1757-899X/56/1/012001ISI: 000338125900001ScopusID: 2-s2.0-84902153970OAI: diva2:821237
Symposium G on Alternative Approaches of SiC and Related Wide Bandgap Materials in Light Emitting and Solar Cell Applications, Held at the EMRS 2013 Spring Meeting, 27 May 2013 through 31 May 2013, Strasbourg

QC 20150615

Available from: 2015-06-15 Created: 2015-05-22 Last updated: 2015-06-15Bibliographically approved

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Linnarsson, Margareta
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Integrated Devices and Circuits
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