Vertical membrane microvalves in PDMS
2015 (English)In: 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), IEEE , 2015, Vol. 2015, no February, 563-565 p.Conference paper (Refereed)
We present the design, realization and evaluation of the first leak-tight vertical membrane pneumatic microvalve. The design freedom in the vertical valve configuration allows for a flow throughput per footprint area that is increased two orders of magnitude compared to horizontal membrane microvalves.
Place, publisher, year, edition, pages
IEEE , 2015. Vol. 2015, no February, 563-565 p.
, International Conference on Micro Electro Mechanical Systems, ISSN 1084-6999
Other Engineering and Technologies
IdentifiersURN: urn:nbn:se:kth:diva-170486DOI: 10.1109/MEMSYS.2015.7051017ISI: 000370382900148ScopusID: 2-s2.0-84931039153OAI: oai:DiVA.org:kth-170486DiVA: diva2:838707
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, 18 January 2015 through 22 January 2015, Estoril, Portugal
QC 201507012015-07-012015-07-012016-03-29Bibliographically approved