On the role of metastables in capacitively coupled oxygen discharges
2015 (English)In: Plasma sources science & technology (Print), ISSN 0963-0252, E-ISSN 1361-6595, Vol. 24, no 3, 035016Article in journal (Refereed) Published
The roles of the metastable atoms O(D-1) and molecules O-2(a(1)Delta(g)) in a capacitively coupled rf driven oxygen discharge at 50 mTorr are explored using the one-dimensional object- oriented PIC/MCC code oopd1, which has one spatial dimension and three velocity components. The oxygen discharge model considers the species O2(X3 Sigma g-), O-2(a(1)Delta(g)) O(P-3), O(D-1), O-2(+), O+, O-, and electrons. The particle density profiles, the electron heating rate profile, the electron energy probability function and the ion energy distribution function at the grounded electrode are explored, including and/or excluding the metastables and secondary electron emission. We find that detachment by the metastable molecule O-2(a(1)Delta(g)) has a significant influence on the discharge properties such as the electronegativity, the effective electron temperature and the electron heating processes.
Place, publisher, year, edition, pages
2015. Vol. 24, no 3, 035016
IdentifiersURN: urn:nbn:se:kth:diva-171323DOI: 10.1088/0963-0252/24/3/035016ISI: 000356857800041OAI: oai:DiVA.org:kth-171323DiVA: diva2:843131
QC 201507272015-07-272015-07-272015-07-27Bibliographically approved