Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter
2015 (English)In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 40, no 15, 3556-3559 p.Article in journal, Letter (Refereed) Published
We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieves a 530 pm resonance wavelength tuning, i.e., more than a fourfold improvement compared to previous MEMS tunable ring resonator add-drop filters. Moreover, our device has a static power consumption below 100 nW, and a tuning rate of -62 pm/V, i.e., the highest reported rate for electrostatic tuning of ring resonator add-drop filters.
Place, publisher, year, edition, pages
Optical Society of America, 2015. Vol. 40, no 15, 3556-3559 p.
Research subject Electrical Engineering
IdentifiersURN: urn:nbn:se:kth:diva-171433DOI: 10.1364/OL.40.003556ISI: 000358802800031ScopusID: 2-s2.0-84943188972OAI: oai:DiVA.org:kth-171433DiVA: diva2:844004
FunderEU, European Research Council, 267528EU, European Research Council, 277879Swedish Research Council, 621-2012-5364
QC 201508112015-08-032015-08-032015-08-27Bibliographically approved