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Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-0525-8647
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9008-8402
2015 (English)In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 40, no 15, 3556-3559 p.Article in journal, Letter (Refereed) Published
Abstract [en]

We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-€“drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieves a 530 pm resonance wavelength tuning, i.e., more than a fourfold improvement compared to previous MEMS tunable ring resonator add-€“drop filters. Moreover, our device has a static power consumption below 100 nW, and a tuning rate of -ˆ’62 €€‰pm/V, i.e., the highest reported rate for electrostatic tuning of ring resonator add-€“drop filters.

Place, publisher, year, edition, pages
Optical Society of America, 2015. Vol. 40, no 15, 3556-3559 p.
National Category
Telecommunications
Research subject
Electrical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-171433DOI: 10.1364/OL.40.003556ISI: 000358802800031Scopus ID: 2-s2.0-84943188972OAI: oai:DiVA.org:kth-171433DiVA: diva2:844004
Projects
VR-HET
Funder
EU, European Research Council, 267528EU, European Research Council, 277879Swedish Research Council, 621-2012-5364
Note

QC 20150811

Available from: 2015-08-03 Created: 2015-08-03 Last updated: 2017-12-04Bibliographically approved

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Niklaus, FrankStemme, GöranGylfason, Kristinn B.

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