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Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ
Silex Microsystems, Stockholm, Sweden.
Silex Microsystems, Stockholm, Sweden.
Evatec Advanced Technologies AG, Balzers, Liechtenstein.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)ORCID iD: 0000-0002-8264-3231
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2015 (English)In: Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on, IEEE conference proceedings, 2015, 811-814 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports of fabricated unpatterned ferromagnetic NiFe/AlN multilayer composites and an established process flow for magnetic core material suitable for integration with Silex 3D RF TSV technology. The fabricated single-loop test inductors achieved an inductance enhancement of 4.8 and a quality factor enhancement of 4.5 at 400 MHz. Simulations show that magnetic material in connection with 3D TSV inductors result in an inductance enhancement up to a factor of 5 at GHz frequencies for the same inductor area or the same inductance can be achieved at 9 times smaller area and cost.

Place, publisher, year, edition, pages
IEEE conference proceedings, 2015. 811-814 p.
Keyword [en]
MEMS foundry, NiFe/AlN multilayer composite, RF microstrip, magnetic materials, micromachined inductors
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-172290DOI: 10.1109/TRANSDUCERS.2015.7181047ISI: 000380461400202Scopus ID: 2-s2.0-84955485398OAI: oai:DiVA.org:kth-172290DiVA: diva2:846217
Conference
18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS),Anchorage, AK, USA ,21-25 June 2015
Note

QC 20150828

Available from: 2015-08-14 Created: 2015-08-14 Last updated: 2016-09-02Bibliographically approved

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