Change search
ReferencesLink to record
Permanent link

Direct link
Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ
Silex Microsystems, Stockholm, Sweden.
Silex Microsystems, Stockholm, Sweden.
Evatec Advanced Technologies AG, Balzers, Liechtenstein.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
Show others and affiliations
2015 (English)In: Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on, IEEE conference proceedings, 2015, 811-814 p.Conference paper (Refereed)
Abstract [en]

This paper reports of fabricated unpatterned ferromagnetic NiFe/AlN multilayer composites and an established process flow for magnetic core material suitable for integration with Silex 3D RF TSV technology. The fabricated single-loop test inductors achieved an inductance enhancement of 4.8 and a quality factor enhancement of 4.5 at 400 MHz. Simulations show that magnetic material in connection with 3D TSV inductors result in an inductance enhancement up to a factor of 5 at GHz frequencies for the same inductor area or the same inductance can be achieved at 9 times smaller area and cost.

Place, publisher, year, edition, pages
IEEE conference proceedings, 2015. 811-814 p.
Keyword [en]
MEMS foundry, NiFe/AlN multilayer composite, RF microstrip, magnetic materials, micromachined inductors
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
URN: urn:nbn:se:kth:diva-172290DOI: 10.1109/TRANSDUCERS.2015.7181047ISI: 000380461400202ScopusID: 2-s2.0-84955485398OAI: diva2:846217
18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS),Anchorage, AK, USA ,21-25 June 2015

QC 20150828

Available from: 2015-08-14 Created: 2015-08-14 Last updated: 2016-09-02Bibliographically approved

Open Access in DiVA

fulltext(524 kB)97 downloads
File information
File name FULLTEXT01.pdfFile size 524 kBChecksum SHA-512
Type fulltextMimetype application/pdf

Other links

Publisher's full textScopusIEEEXplore

Search in DiVA

By author/editor
Shah, UmerOberhammer, Joachim
By organisation
Micro and Nanosystems
Other Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar
Total: 97 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 98 hits
ReferencesLink to record
Permanent link

Direct link