Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Nanopore arrays in a silicon membrane for parallel single-molecule detection: fabrication
KTH, School of Information and Communication Technology (ICT), Materials- and Nano Physics, Material Physics, MF.
KTH, School of Information and Communication Technology (ICT), Materials- and Nano Physics, Material Physics, MF.ORCID iD: 0000-0002-8962-1844
KTH, School of Information and Communication Technology (ICT), Materials- and Nano Physics, Material Physics, MF.ORCID iD: 0000-0003-2562-0540
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
Show others and affiliations
2015 (English)In: Nanotechnology, ISSN 0957-4484, E-ISSN 1361-6528, Vol. 26, no 31, 314001Article in journal (Refereed) Published
Abstract [en]

Solid state nanopores enable translocation and detection of single bio-molecules such as DNA in buffer solutions. Here, sub-10 nm nanopore arrays in silicon membranes were fabricated by using electron-beam lithography to define etch pits and by using a subsequent electrochemical etching step. This approach effectively decouples positioning of the pores and the control of their size, where the pore size essentially results from the anodizing current and time in the etching cell. Nanopores with diameters as small as 7 nm, fully penetrating 300 nm thick membranes, were obtained. The presented fabrication scheme to form large arrays of nanopores is attractive for parallel bio-molecule sensing and DNA sequencing using optical techniques. In particular the signal-to-noise ratio is improved compared to other alternatives such as nitride membranes suffering from a high-luminescence background.

Place, publisher, year, edition, pages
2015. Vol. 26, no 31, 314001
Keyword [en]
nanopore, parallel, single-molecule
National Category
Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-172675DOI: 10.1088/0957-4484/26/31/314001ISI: 000358676300003PubMedID: 26180043Scopus ID: 2-s2.0-84937797128OAI: oai:DiVA.org:kth-172675DiVA: diva2:850299
Funder
Swedish Foundation for Strategic Research , RMA08-0090
Note

QC 20150901

Available from: 2015-09-01 Created: 2015-08-27 Last updated: 2017-12-04Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textPubMedScopus

Authority records BETA

Sychugov, IlyaLinnros, Jan

Search in DiVA

By author/editor
Schmidt, TorstenZhang, MiaoSychugov, IlyaRoxhed, NiclasLinnros, Jan
By organisation
Material Physics, MFMicro and Nanosystems
In the same journal
Nanotechnology
Nano Technology

Search outside of DiVA

GoogleGoogle Scholar

doi
pubmed
urn-nbn

Altmetric score

doi
pubmed
urn-nbn
Total: 119 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf