A wafer level liquid cavity integrated amperometric gas sensor with ppb leve nitric oxide gas sensitivity
(English)Article in journal (Refereed) In press
A miniaturized amperometric nitric oxide (NO) gas sensor based on wafer-level fabrication of electrodes and a liquid electrolyte chamber is reported in this paper. The sensor is able to detect NO gas concentrations of the order of parts per billion (ppb) levels and has a measured sensitivity of 0.04 nA ppb−1 with a response time of approximately 12 s. A sufficiently high selectivity of the sensor to interfering gases such as carbon monoxide (CO) and to ammonia (NH3) makes it potentially relevant for monitoring of asthma. In addition, the sensor was characterized for electrolyte evaporation which indicated a sensor operation lifetime allowing approximately 200 measurements.
nitric oxide, amperometric, gas sensor, MEMS, silicon, Nafion
Engineering and Technology
IdentifiersURN: urn:nbn:se:kth:diva-172968OAI: oai:DiVA.org:kth-172968DiVA: diva2:851087
QP 2015092015-09-032015-09-032015-09-07Bibliographically approved