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On the formation and annihilation of the singlet molecular metastables in an oxygen discharge
KTH, School of Electrical Engineering (EES), Space and Plasma Physics. University of Iceland, Iceland.ORCID iD: 0000-0002-8153-3209
2015 (English)In: Journal of Physics D: Applied Physics, ISSN 0022-3727, E-ISSN 1361-6463, Vol. 48, no 32, 325202Article in journal (Refereed) Published
Abstract [en]

We describe a volume averaged global model for an inductively coupled RF oxygen discharge that considers an extensive reaction set that includes the species: O-2(X-3 Sigma(-)(g)), O-2(a(1)Delta(g)), O-2(b(1)Sigma(+)(g)), O-2(A(3)Sigma(+)(u), A('3)Delta u, c(1)Sigma(-)(u)), O-2(+), O-2(-), O(P-3), O(D-1), O+, O-, O-3, O-3(+), O-3(-), and electrons. We propose revised rate coefficients for some of the reactions and explore the densities of various species as a function of discharge pressure, in the pressure range 1-100 mTorr. We find that the O-2(a(1)Delta(g)) density can be lower than the O-2(b(1)Sigma(+)(g)) density in the pressure range from 2.5 to 80 mTorr. The relative reaction rates for formation and annihilation of O-2(a(1)Delta(g)) and O-2(b(1)Sigma(+)(g)) are evaluated and the most important reactions are indicated. The O- loss process is also studied. The results show that O-2(a(1)Delta(g)) has only a small contribution to the loss of the negative ion O-, while electron impact detachment is a very effective loss process at low pressure (<2 mTorr) and detachment by the oxygen atom O(P-3) and the metastable singlet O-2(b(1)Sigma(+)(g)) are the most effective loss process up to roughly 50 mTorr where charge exchange becomes the most effective process for O- loss.

Place, publisher, year, edition, pages
Institute of Physics Publishing (IOPP), 2015. Vol. 48, no 32, 325202
Keyword [en]
oxygen discharge, detachment processes, metastables, electronegativity, weakly ionized plasma
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:kth:diva-173142DOI: 10.1088/0022-3727/48/32/325202ISI: 000358937800011Scopus ID: 2-s2.0-84938802019OAI: oai:DiVA.org:kth-173142DiVA: diva2:854932
Funder
VINNOVA, 2014-04876
Note

QC 20150918

Available from: 2015-09-18 Created: 2015-09-07 Last updated: 2017-12-04Bibliographically approved

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