Change search
ReferencesLink to record
Permanent link

Direct link
Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-4867-0391
Show others and affiliations
2015 (English)In: Solid-State Electronics, ISSN 0038-1101, E-ISSN 1879-2405, Vol. 113, 157-166 p.Article in journal (Refereed) Published
Abstract [en]

Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low-power digital electronics. This paper reports the demonstration of prototype circuits including the first 3-stage ring oscillator built using cell-level digital logic elements based on curved NEM switches. The ring oscillator core occupies an area of 30 mu m x 10 mu m using 6 NEM switches. Each NEM switch device has a footprint of 5 mu m x 3 mu m, an air gap of 60 mu m and is coated with amorphous carbon (a-C) for reliable operation. The ring oscillator operates at a frequency of 6.7 MHz, and confirms the simulated inverter propagation delay of 25 ns. The successful fabrication and measurement of this demonstrator are key milestones on the way towards an optimized, scaled technology with sub-nanosecond switching times, lower operating voltages and VLSI implementation.

Place, publisher, year, edition, pages
2015. Vol. 113, 157-166 p.
Keyword [en]
NEMS, Ring oscillator, VLSI, Digital logic design, Curved cantilever, Amorphous carbon
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
URN: urn:nbn:se:kth:diva-173125DOI: 10.1016/j.sse.2015.05.029ISI: 000359170600026ScopusID: 2-s2.0-84937250804OAI: diva2:855115
44th European Solid-State Device Research Conference (ESSDERC), SEP 22-26, 2014, Venice, ITALY

QC 20150918

Available from: 2015-09-18 Created: 2015-09-07 Last updated: 2015-09-18Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textScopus

Search in DiVA

By author/editor
Bleiker, Simon J.Niklaus, Frank
By organisation
Micro and Nanosystems
In the same journal
Solid-State Electronics
Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 111 hits
ReferencesLink to record
Permanent link

Direct link