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Integration of polymer based microfluidics with silicon photonics for biosensing applications
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9008-8402
(Mikro- och nanosystemteknik, Micro and Nanosystems)
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-6443-878X
(Mikro- och nanosystemteknik, Micro and Nanosystems)ORCID iD: 0000-0003-4322-6192
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2015 (English)Conference paper, Oral presentation only (Other academic)
Abstract [en]

We present a novel integration method for packaging silicon photonic sensors with polymer microfluidics, designed to be suitable for wafer-level production. The method addresses the previously unmet manufacturing challenges of matching the microfluidic footprint area to that of the photonics, and of robust bonding of microfluidic layers to biofunctionalized surfaces. We demonstrate the fabrication, in a single step, of a microfluidic layer in the recently introduced OSTE polymer, and the subsequent unassisted dry bonding of the microfluidic layer to a grating coupled silicon photonic ring resonator sensor chip. The microfluidic layer features photopatterned through holes (vias) for optical fiber probing and fluid connections, as well as molded microchannels and tube connectors, and is manufactured and subsequently bonded to a silicon sensor chip in less than 10 minutes. Combining this new microfluidic packaging method with photonic waveguide surface gratings for light couplin g allows matching the size scale of microfluidics to that of current silicon photonic biosensors.

Place, publisher, year, edition, pages
2015.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-173865OAI: oai:DiVA.org:kth-173865DiVA: diva2:855549
Conference
The 2015 E-MRS Fall Meeting and Exhibit, Warsaw, Poland.
Projects
CellRingVR-HETXMEMS
Funder
Swedish Research Council, B0460801EU, European Research Council, 267528Swedish Research Council, 621-2012-5364
Note

QC 20150928

Available from: 2015-09-21 Created: 2015-09-21 Last updated: 2015-09-28Bibliographically approved

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Gylfason, Kristinn B.Sandström, NiklasShafagh, Reza ZandiWijngaart, Wouter van derHaraldsson, Tommy

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