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Vacuum-sealed and gas-filled micromachined devices
KTH, Superseded Departments, Signals, Sensors and Systems.
1999 (English)Doctoral thesis, comprehensive summary (Other scientific)
Place, publisher, year, edition, pages
Stockholm: Signaler, sensorer och system , 1999. , 80 p.
Trita-ILA, ISSN 0281-2878 ; 99:01
URN: urn:nbn:se:kth:diva-2871ISBN: 91-7170-482-5OAI: diva2:8599
Public defence
NR 20140805Available from: 2000-01-01 Created: 2000-01-01Bibliographically approved

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