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Waveguide-coupled micro-ball lens array suitable for mass fabrication
KTH, School of Information and Communication Technology (ICT), Materials- and Nano Physics. (FMI FOTONIK O MIKROVĂ…GSTEKNIK)ORCID iD: 0000-0002-6981-2037
KTH, School of Information and Communication Technology (ICT), Materials- and Nano Physics. (FMI FOTONIK O MIKROVĂ…GSTEKNIK)
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2015 (English)In: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 23, no 17, 22414-22423 p.Article in journal (Refereed) Published
Abstract [en]

We demonstrate a fabrication procedure for the direct integration of micro-ball lenses on planar integrated optical channel waveguide chips with the aim to reduce the divergence of light that arises from the waveguide in both horizontal and vertical directions. Fabrication of the lenses is based on photoresist reflow which is a procedure that allows for the use of photolithography for careful alignment of the lenses with respect to the waveguides and enables mass production. We present in detail the design and fabrication procedures. Optical characterization of the fabricated micro-ball lenses demonstrates a good performance in terms of beam-size reduction and beam shape. The beam half divergence angle of 1544 nm light is reduced from 12.4 degrees to 1.85 degrees.

Place, publisher, year, edition, pages
[Chang, Lantian; Subramaniam, Vinod; Kanger, Johannes S.] Univ Twente, Nanobiophys, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands. [Chang, Lantian; Subramaniam, Vinod; Kanger, Johannes S.] Univ Twente, MIRA Inst Biomed Technol & Tech Med, NL-7500 AE Enschede, Netherlands. [Dijkstra, Meindert] Univ Twente, Opt Sci Grp, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands. [Ismail, Nur; Pollnau, Markus] KTH Royal Inst Technol, Sch Informat & Commun Technol, Dept Mat & Nano Phys, SE-16440 Kista, Sweden. [de Ridder, Rene M.] Univ Twente, Fac Elect Engn Math & Comp Sci, NL-7500 AE Enschede, Netherlands. [Worhoff, Kerstin] LioniX BV, NL-7500 AL Enschede, Netherlands. [Subramaniam, Vinod] FOM Inst AMOLF, NL-1098 XG Amsterdam, Netherlands., 2015. Vol. 23, no 17, 22414-22423 p.
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:kth:diva-176373DOI: 10.1364/OE.23.022414ISI: 000362418300077PubMedID: 26368211Scopus ID: 2-s2.0-84957536068OAI: oai:DiVA.org:kth-176373DiVA: diva2:867860
Note

QC 20151106

Available from: 2015-11-06 Created: 2015-11-03 Last updated: 2017-12-01Bibliographically approved

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