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Polymide V-groove joints for three - dimensional silicon transducers
KTH, Superseded Departments, Signals, Sensors and Systems.
2000 (English)Doctoral thesis, comprehensive summary (Other scientific)
Place, publisher, year, edition, pages
Stockholm: Signaler, sensorer och system , 2000. , viii, 144 p.
Trita-ILA, ISSN 0281-2878 ; 0001
URN: urn:nbn:se:kth:diva-2978ISBN: 91-7170-568-6OAI: diva2:8720
Public defence
NR 20140805Available from: 2000-05-26 Created: 2000-05-26Bibliographically approved

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