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Argon metastables in HiPIMS: Validation of the ionization region model by direct comparison to time resolved tunable diode-laser diagnostics
KTH, School of Electrical Engineering (EES), Space and Plasma Physics. Université Paris-Sud, France.
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2015 (English)In: Plasma sources science & technology (Print), ISSN 0963-0252, E-ISSN 1361-6595, Vol. 24, no 4, 045011Article in journal (Refereed) Published
Abstract [en]

The volume plasma interactions of high power impulse magnetron sputtering (HiPIMS) discharges operated with a Ti target is analyzed in detail by combining time-resolved diagnostics with modeling of plasma kinetics. The model employed is the ionization region model (IRM) with an improved and detailed treatment of the kinetics of the argon metastable (Arm) state, called m-IRM. The diagnostics used is tunable diode-laser absorption spectroscopy (TD-LAS) of the Arm state, which gives the line-of-sight density integrated along the laser path parallel to the target surface. The TD-LAS recordings exhibit quite complex temporal evolutions Arm(t), with distinct features that are shown to reflect the time evolution of the plasma (the electron density and temperature), and of the argon gas (gas rarefaction and refill). The Arm(t) function is thus a tracer for the most important aspects of internal discharge physics, and therefore suitable for model testing and validation. The IRM model is constructed to be locked to obey specific experimental macroscopic discharge parameters, specifically the discharge current I<inf>D</inf>(t) and the voltage U<inf>D</inf>(t). It has to this purpose been run with the appropriate process gas pressures (from 0.67 to 2.67 Pa), with the experimentally applied voltage pulse profiles U<inf>D</inf>(t), and with the resulting current pulse profiles I<inf>D</inf>(t) (with maxima from 0.5 to 70 A). It is shown that the model reproduces the features in the TD-LAS measurements: both the Arm(t) evolution in single pulses, and how the pulse shapes change with gas pressure and with pulse amplitude. The good agreement between the measurements and model output is in this work taken to validate the basic assumptions of the m-IRM. In addition, the m-IRM results have been used to unravel the connections between volume plasma kinetics and various features recorded in the TD-LAS measurement, and to generalize the foremost characteristics of the studied discharges.

Place, publisher, year, edition, pages
Institute of Physics Publishing (IOPP), 2015. Vol. 24, no 4, 045011
Keyword [en]
argon metastable, argon plasma kinetics, HiPIMS, metastable ionization region model, tunable dioade laser absorption spectrocopy, Absorption spectroscopy, Argon, Electric discharges, Ionization, Ionization of gases, Kinetics, Laser diagnostics, Magnetron sputtering, Plasma interactions, Semiconductor lasers, Argon plasmas, Discharge parameters, High power impulse magnetron sputtering (HIPIMS), Laser absorption, Measurements and modeling, Region models, Tunable diode laser absorption spectroscopy, Argon lasers
National Category
Fusion, Plasma and Space Physics
URN: urn:nbn:se:kth:diva-177759DOI: 10.1088/0963-0252/24/4/045011ISI: 000364098900023ScopusID: 2-s2.0-84939244154OAI: diva2:875081

QC 20151130

Available from: 2015-11-30 Created: 2015-11-25 Last updated: 2015-11-30Bibliographically approved

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Brenning, Nils
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