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Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator
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2015 (English)In: 4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015, IEEE conference proceedings, 2015Conference paper, Published paper (Refereed)
Abstract [en]

The high contrast grating (HCG) mirror has been illustrated and characterized. The investigated parameters including grating periods and filling factors were calculated by finite-difference time-domain method. The two-dimension HCG was fabricated by electron-beam lithography and inductively coupled plasma process. The reflectivity of the fabricated HCG mirror was measured, resulting in around 200 nm bandwidth. The measured result also showed a good agreement with calculated one. This achievement was promising in developing the novel light emitters in the telecommunication region.

Place, publisher, year, edition, pages
IEEE conference proceedings, 2015.
Keyword [en]
gratings, nanostructure fabrication, silicon-on-insulator, subwavelength structure, Diffraction gratings, Electron beam lithography, Fabrication, Inductively coupled plasma, Mirrors, Silicon on insulator technology, Time domain analysis, Filling factor, Grating periods, High contrast grating (HCG), Light emitters, Measured results, Sub-wave length grating, Sub-wavelength structures, Finite difference time domain method
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:kth:diva-174780DOI: 10.1109/ISNE.2015.7132036ISI: 000380530500094Scopus ID: 2-s2.0-84939445841ISBN: 9781479942084 (print)OAI: oai:DiVA.org:kth-174780DiVA: diva2:877897
Conference
4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015, 4 May 2015 through 6 May 2015
Note

QC 20151208

Available from: 2015-12-08 Created: 2015-10-07 Last updated: 2016-09-05Bibliographically approved

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  • apa
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Language
  • de-DE
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  • en-US
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  • nn-NO
  • nn-NB
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  • Other locale
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Output format
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  • asciidoc
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