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A wafer-level liquid cavity integrated amperometric gas sensor with ppb-level nitric oxide gas sensitivity
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
2015 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 25, no 10, 105013Article in journal (Refereed) PublishedText
Abstract [en]

A miniaturized amperometric nitric oxide (NO) gas sensor based on wafer-level fabrication of electrodes and a liquid electrolyte chamber is reported in this paper. The sensor is able to detect NO gas concentrations of the order of parts per billion (ppb) levels and has a measured sensitivity of 0.04 nA ppb(-1) with a response time of approximately 12 s. A sufficiently high selectivity of the sensor to interfering gases such as carbon monoxide (CO) and to ammonia (NH3) makes it potentially relevant for monitoring of asthma. In addition, the sensor was characterized for electrolyte evaporation which indicated a sensor operation lifetime allowing approximately 200 measurements.

Place, publisher, year, edition, pages
Institute of Physics Publishing (IOPP), 2015. Vol. 25, no 10, 105013
Keyword [en]
nitric oxide, amperometric, gas sensor, MEMS, silicon, Nafion(TM)
National Category
Nano Technology
URN: urn:nbn:se:kth:diva-180367DOI: 10.1088/0960-1317/25/10/105013ISI: 000366827400029ScopusID: 2-s2.0-84947461316OAI: diva2:894440

QC 20160114

Available from: 2016-01-15 Created: 2016-01-13 Last updated: 2016-01-15Bibliographically approved

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