A wafer-level liquid cavity integrated amperometric gas sensor with ppb-level nitric oxide gas sensitivity
2015 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 25, no 10, 105013Article in journal (Refereed) PublishedText
A miniaturized amperometric nitric oxide (NO) gas sensor based on wafer-level fabrication of electrodes and a liquid electrolyte chamber is reported in this paper. The sensor is able to detect NO gas concentrations of the order of parts per billion (ppb) levels and has a measured sensitivity of 0.04 nA ppb(-1) with a response time of approximately 12 s. A sufficiently high selectivity of the sensor to interfering gases such as carbon monoxide (CO) and to ammonia (NH3) makes it potentially relevant for monitoring of asthma. In addition, the sensor was characterized for electrolyte evaporation which indicated a sensor operation lifetime allowing approximately 200 measurements.
Place, publisher, year, edition, pages
Institute of Physics Publishing (IOPP), 2015. Vol. 25, no 10, 105013
nitric oxide, amperometric, gas sensor, MEMS, silicon, Nafion(TM)
IdentifiersURN: urn:nbn:se:kth:diva-180367DOI: 10.1088/0960-1317/25/10/105013ISI: 000366827400029ScopusID: 2-s2.0-84947461316OAI: oai:DiVA.org:kth-180367DiVA: diva2:894440
QC 201601142016-01-152016-01-132016-01-15Bibliographically approved