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A volume averaged global model study of the influence of the electron energy distribution and the wall material on an oxygen discharge
KTH, School of Electrical Engineering (EES), Space and Plasma Physics. Science Institute, University of Iceland, Dunhaga 3, Reykjavik, Iceland.
2015 (English)In: Journal of Physics D: Applied Physics, ISSN 0022-3727, E-ISSN 1361-6463, Vol. 48, no 49Article in journal (Refereed) PublishedText
Abstract [en]

A low pressure high density oxygen discharge is studied through a global (volume averaged) model in the pressure range 0.5-100 mTorr. The goal of this work is to evaluate the dependence of collisional energy loss per electron-ion pair created, effective electron temperature, mean density of species, and mean electronegativity on the electron energy distribution function. Differences in the results for Maxwellian and non-Maxwellian distributions show the importance of using a proper electron energy distribution function in discharge modelling. We also explore the differences due to different reactor wall materials comparing the results for an anodized aluminium reactor with a stainless steel reactor. Due to the low recombination coefficient for oxygen atoms on the anodized aluminium walls, the yield of atomic oxygen in anodized aluminium reactors increases significantly as compared to stainless steel reactors. However, the difference of the yield of atomic oxygen in these reactors decreases as pressure increases. Thus, anodized aluminium reactors can be desired for applications where a high concentration of atomic oxygen is required. Finally, the importance of quenching coefficient for plasma modelling is stressed through the quenching coefficient at the walls for O2(b1Σ+g). Low quenching coefficients result in high densities of O2(b1Σ+g) affecting the mean electronegativity of the plasma due to the decrease in the density of O-2.

Place, publisher, year, edition, pages
Institute of Physics (IOP), 2015. Vol. 48, no 49
Keyword [en]
electron energy distribution function, electronegativity, oxygen discharge, volume averaged global model, weakly ionized plasma
National Category
Fusion, Plasma and Space Physics
Identifiers
URN: urn:nbn:se:kth:diva-181965DOI: 10.1088/0022-3727/48/49/495203ISI: 000368442600013ScopusID: 2-s2.0-84948167655OAI: oai:DiVA.org:kth-181965DiVA: diva2:902801
Funder
VINNOVA, 2014-04876
Note

QC 20160212. QC 20160216

Available from: 2016-02-12 Created: 2016-02-11 Last updated: 2016-02-16Bibliographically approved

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