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Rutherford back-scattering spectrometry and recoil spectrometry
KTH, School of Information and Communication Technology (ICT). (Solid State Electronics)ORCID iD: 0000-0002-5845-3032
2007 (English)In: Surface Characterization: A User's Sourcebook, Wiley-Blackwell, 2007, 254-271 p.Chapter in book (Other academic)
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Text
Place, publisher, year, edition, pages
Wiley-Blackwell, 2007. 254-271 p.
Keyword [en]
Recoil spectrometry, Rutherford Back-scattering Spectrometry, Scattering kinematics, Stoichiometry of silicide layer, Thin metal film
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Other Engineering and Technologies
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URN: urn:nbn:se:kth:diva-181297DOI: 10.1002/9783527612451.ch16Scopus ID: 2-s2.0-84950152272ISBN: 9783527612451 (print)OAI: oai:DiVA.org:kth-181297DiVA: diva2:903738
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QC 20160216

Available from: 2016-02-16 Created: 2016-01-29 Last updated: 2016-02-16Bibliographically approved

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CiteExportLink to record
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  • apa
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