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Capacitive inertial sensing at high temperatures of up to 400 degrees C
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. Ecole Polytech Fed Lausanne, Switzerland.ORCID iD: 0000-0002-8050-0042
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. Karlsruhe Inst Technol,Germany.ORCID iD: 0000-0003-3452-6361
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-9327-2544
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2016 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 238, 361-368 p.Article in journal (Refereed) PublishedText
Abstract [en]

High-temperature-resistant inertial sensors are increasingly requested in a variety of fields such as aerospace, automotive and energy. Capacitive detection is especially suitable for sensing at high temperatures due to its low intrinsic temperature dependence. In this paper, we present high-temperature measurements utilizing a capacitive accelerometer, thereby proving the feasibility of capacitive detection at temperatures of up to 400 degrees C. We describe the observed characteristics as the temperature is increased and propose an explanation of the physical mechanisms causing the temperature dependence of the sensor, which mainly involve the temperature dependence of the Young's modulus and of the viscosity and the pressure of the gas inside the sensor cavity. Therefore a static electromechanical model and a dynamic model that takes into account squeeze film damping were developed.

Place, publisher, year, edition, pages
Elsevier, 2016. Vol. 238, 361-368 p.
Keyword [en]
High temperature, Harsh environment, Inertial sensors, Capacitive detection, Accelerometer
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-183657DOI: 10.1016/j.sna.2015.12.025ISI: 000370306100040ScopusID: 2-s2.0-84954190617OAI: oai:DiVA.org:kth-183657DiVA: diva2:913137
Funder
Knut and Alice Wallenberg FoundationEU, European Research Council, 277879
Note

QC 20160319

Available from: 2016-03-19 Created: 2016-03-18 Last updated: 2016-03-19Bibliographically approved

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Asiatici, MikhailFischer, Andreas C.Haasl, SjoerdStemme, GöranNiklaus, Frank
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